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Principles and Applications of NanoMEMS Physics

Author: Héctor J Santos
Publisher: Boston, MA : Springer, 2005.
Series: Microsystems, 15; Springer ebook collection / Chemistry and Materials Science 2005-2008
Edition/Format:   Computer file : EnglishView all editions and formats
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Material Type: Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Héctor J Santos
ISBN: 9780387258348 0387258345
OCLC Number: 873698506
Reproduction Notes: Reproduction. Boston, MA : Springer, 2005.
Description: S. : v.: digital
Series Title: Microsystems, 15; Springer ebook collection / Chemistry and Materials Science 2005-2008
Responsibility: by Héctor J. Santos.

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