skip to content
Principles of physical vapor deposition of thin films Preview this item
ClosePreview this item

Principles of physical vapor deposition of thin films

Author: K S SreeHarsha
Publisher: Amsterdam ; Boston ; London : Elsevier, 2006.
Edition/Format:   eBook : Document : English : 1st edView all editions and formats
Database:WorldCat
Summary:
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide  Read more...
Getting this item's online copy... Getting this item's online copy...

Find a copy in the library

Getting this item's location and availability... Getting this item's location and availability...

WorldCat

Find it in libraries globally
Worldwide libraries own this item

Details

Genre/Form: Electronic books
Additional Physical Format: Print version:
SreeHarsha, K.S.
Principles of physical vapor deposition of thin films.
Amsterdam ; Boston ; London : Elsevier, 2006
(DLC) 2005937842
(OCoLC)61217411
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: K S SreeHarsha
ISBN: 9780080446998 008044699X 9780080480312 0080480314
OCLC Number: 162568390
Description: 1 online resource (xi, 1160 pages) : illustrations
Contents: Introduction --
Evaporation --
Plasma state --
Cold plasma discharges --
Thermal evaporation sources --
Gas glow in thin film processing systems --
Special sources --
Gas solid interactions --
Nucleation and growth of films --
Epitaxy --
Substrate preparation --
Structure and properties of films --
Dry etching.
Responsibility: K.S. Sree Harsha.

Abstract:

The goal of producing devices that are smaller, faster, and more functional has given thin film processing a unique role in technology. This work aims to provide the foundation upon which thin film  Read more...
Retrieving notes about this item Retrieving notes about this item

Reviews

User-contributed reviews

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.