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Principles of plasma discharges and materials processing

Author: M A Lieberman; Allan J Lichtenberg
Publisher: Hoboken, N.J. : Wiley-Interscience, ©2005.
Edition/Format:   Print book : English : 2nd edView all editions and formats
Database:WorldCat
Summary:
"The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals." "The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: M A Lieberman; Allan J Lichtenberg
ISBN: 0471720011 9780471720010
OCLC Number: 56752658
Description: xxxv, 757 pages : illustrations ; 25 cm
Contents: Basic plasma equations and equilibrium --
Atomic collisions --
Plasma dynamics --
Diffusion and transport --
Direct current (DC) sheaths --
Chemical reactions and equilibrium --
Molecular collisions --
Chemical kinetics and surface processes --
Particle and energy balance in discharges --
Capacitive discharges --
Inductive discharges --
Wave-heated discharges --
Direct current (DC) discharges --
Etching --
Deposition and implantation --
Dusty plasmas --
Kinetic theory of discharges.
Responsibility: Michael A. Lieberman, Allan J. Lichtenberg.
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Abstract:

"The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals." "The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters."

"With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever."--Jacket.

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