skip to content
Proceedings of the Eighth Symposium on Plasma Processing Preview this item
ClosePreview this item
Checking...

Proceedings of the Eighth Symposium on Plasma Processing

Author: G S Mathad; Dennis W Hess; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1990.
Series: Proceedings (Electrochemical Society), v. 90-14.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: G S Mathad; Dennis W Hess; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.
OCLC Number: 22663840
Notes: "Dielectric Science and Technology and Electronics divisions."
Description: xi, 787 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 90-14.
Other Titles: Plasma processing
Responsibility: edited by G.S. Mathad and D.W. Hess.

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/22663840> # Proceedings of the Eighth Symposium on Plasma Processing
    a schema:Book, schema:CreativeWork ;
   library:oclcnum "22663840" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nju> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/24164598#Place/pennington_nj_10_s_main_st_pennington_08534_2896> ; # Pennington, NJ (10 S. Main St., Pennington 08534-2896)
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/plasma_etching> ; # Plasma etching
   schema:about <http://dewey.info/class/621.38152/e20/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/semiconductors_etching_congresses> ; # Semiconductors--Etching--Congresses
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/semiconducteurs> ; # Semiconducteurs
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/technique_des_plasmas> ; # Technique des plasmas
   schema:about <http://id.worldcat.org/fast/1112219> ; # Semiconductors--Etching
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/plasma_etching_congresses> ; # Plasma etching--Congresses
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/gravure_par_plasma> ; # Gravure par plasma
   schema:about <http://experiment.worldcat.org/entity/work/data/24164598#Topic/semiconductors_etching> ; # Semiconductors--Etching
   schema:about <http://id.worldcat.org/fast/1066327> ; # Plasma etching
   schema:alternateName "Plasma processing" ;
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/35810970> ; # G. S. Mathad
   schema:contributor <http://viaf.org/viaf/150693656> ; # Electrochemical Society. Electronics Division.
   schema:contributor <http://viaf.org/viaf/48124498> ; # Dennis W. Hess
   schema:contributor <http://viaf.org/viaf/140364281> ; # Electrochemical Society. Dielectric Science and Technology Division.
   schema:copyrightYear "1990" ;
   schema:creator <http://experiment.worldcat.org/entity/work/data/24164598#Meeting/symposium_on_plasma_processing_8th_1990_montreal_quebec> ; # Symposium on Plasma Processing (8th : 1990 : Montréal, Québec)
   schema:datePublished "1990" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/24164598> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/24164598#Series/proceedings_the_electrochemical_society> ; # Proceedings / the Electrochemical Society ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/24164598#Series/proceedings_electrochemical_society> ; # Proceedings (Electrochemical Society) ;
   schema:name "Proceedings of the Eighth Symposium on Plasma Processing"@en ;
   schema:productID "22663840" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/22663840#PublicationEvent/pennington_nj_10_s_main_st_pennington_08534_2896_electrochemical_society_1990> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/24164598#Agent/electrochemical_society> ; # Electrochemical Society
   schema:url <http://www.gbv.de/dms/tib-ub-hannover/114758506.pdf> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/22663840> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/24164598#Agent/electrochemical_society> # Electrochemical Society
    a bgn:Agent ;
   schema:name "Electrochemical Society" ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Meeting/symposium_on_plasma_processing_8th_1990_montreal_quebec> # Symposium on Plasma Processing (8th : 1990 : Montréal, Québec)
    a bgn:Meeting, schema:Event ;
   schema:location <http://experiment.worldcat.org/entity/work/data/24164598#Place/montreal_quebec> ; # Montréal, Québec)
   schema:name "Symposium on Plasma Processing (8th : 1990 : Montréal, Québec)" ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Place/montreal_quebec> # Montréal, Québec)
    a schema:Place ;
   schema:name "Montréal, Québec)" ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Place/pennington_nj_10_s_main_st_pennington_08534_2896> # Pennington, NJ (10 S. Main St., Pennington 08534-2896)
    a schema:Place ;
   schema:name "Pennington, NJ (10 S. Main St., Pennington 08534-2896)" ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Series/proceedings_electrochemical_society> # Proceedings (Electrochemical Society) ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/22663840> ; # Proceedings of the Eighth Symposium on Plasma Processing
   schema:name "Proceedings (Electrochemical Society) ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Series/proceedings_the_electrochemical_society> # Proceedings / the Electrochemical Society ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/22663840> ; # Proceedings of the Eighth Symposium on Plasma Processing
   schema:name "Proceedings / the Electrochemical Society ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Topic/gravure_par_plasma> # Gravure par plasma
    a schema:Intangible ;
   schema:name "Gravure par plasma"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Topic/plasma_etching_congresses> # Plasma etching--Congresses
    a schema:Intangible ;
   schema:name "Plasma etching--Congresses"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Topic/semiconductors_etching_congresses> # Semiconductors--Etching--Congresses
    a schema:Intangible ;
   schema:name "Semiconductors--Etching--Congresses"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/24164598#Topic/technique_des_plasmas> # Technique des plasmas
    a schema:Intangible ;
   schema:name "Technique des plasmas"@en ;
    .

<http://id.worldcat.org/fast/1066327> # Plasma etching
    a schema:Intangible ;
   schema:name "Plasma etching"@en ;
    .

<http://id.worldcat.org/fast/1112219> # Semiconductors--Etching
    a schema:Intangible ;
   schema:name "Semiconductors--Etching"@en ;
    .

<http://viaf.org/viaf/140364281> # Electrochemical Society. Dielectric Science and Technology Division.
    a schema:Organization ;
   schema:name "Electrochemical Society. Dielectric Science and Technology Division." ;
    .

<http://viaf.org/viaf/150693656> # Electrochemical Society. Electronics Division.
    a schema:Organization ;
   schema:name "Electrochemical Society. Electronics Division." ;
    .

<http://viaf.org/viaf/35810970> # G. S. Mathad
    a schema:Person ;
   schema:familyName "Mathad" ;
   schema:givenName "G. S." ;
   schema:name "G. S. Mathad" ;
    .

<http://viaf.org/viaf/48124498> # Dennis W. Hess
    a schema:Person ;
   schema:familyName "Hess" ;
   schema:givenName "Dennis W." ;
   schema:name "Dennis W. Hess" ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.