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Proceedings of the First International Symposium on Advanced Materials for ULSI

Author: Martin ScottYoichi AkasakaRafael ReifElectrochemical Society. Electronics Division.Electrochemical Society. Dielectrics and Insulation Division.All authors
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1988.
Series: Proceedings (Electrochemical Society), v. 88-19.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
International Symposium on Advanced Materials for ULSI (1st : 1988 : Atlanta, Ga.).
Proceedings of the First International Symposium on Advanced Materials for ULSI.
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1988
(OCoLC)609590409
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Martin Scott; Yoichi Akasaka; Rafael Reif; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. High Temperature Materials Division.
OCLC Number: 19281926
Notes: "[Sponsored by] Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions [of the Electrochemical Society]."
Description: vi, 246 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 88-19.
Other Titles: Advanced materials for ULSI.
Responsibility: edited by Martin Scott, Yoichi Akasaka, Rafael Reif.

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