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Proceedings of the fourth Symposium on Plasma Processing

Author: G S Mathad; G C Schwartz; G Smolinsky
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, ©1983.
Series: Proceedings (Electrochemical Society), v. 83-10.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: G S Mathad; G C Schwartz; G Smolinsky
OCLC Number: 10996253
Description: x, 649 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 83-10.
Responsibility: edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.

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