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Proceedings of the Symposium on Patterning Science and Technology

Author: Robert GleasonGeorge J HefferonL K WhiteElectrochemical Society. Dielectrics and Insulation Division.Electrochemical Society. Electronics Division.All authors
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1990.
Series: Proceedings (Electrochemical Society), v. 90-1.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Robert Gleason; George J Hefferon; L K White; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Luminescence and Display Materials Group.
OCLC Number: 21409932
Notes: Spine title: Patterning science and technology.
"The First International Symposium on Patterning Science and Technology was presented at the Fall Meeting of the Electrochemical Society, October 15-20, 1989, in Hollywood, Florida"--Page iii.
Description: vii, 248 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 90-1.
Other Titles: Patterning science and technology.
Responsibility: edited by Robert Gleason, George J. Hefferon, L.K. White ; [sponsored by the] Dielectrics and Insulation and Electronics divisions and Luminescence and Display Materials Group.

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Primary Entity

<http://www.worldcat.org/oclc/21409932> # Proceedings of the Symposium on Patterning Science and Technology
    a schema:Book, schema:CreativeWork ;
   library:oclcnum "21409932" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nju> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/190530701#Place/pennington_nj_10_s_main_st_pennington_08534_2896> ; # Pennington, NJ (10 S. Main St., Pennington 08534-2896)
   rdfs:seeAlso <http://experiment.worldcat.org/entity/work/data/190530701#CreativeWork/patterning_science_and_technology> ; # Patterning science and technology.
   schema:about <http://experiment.worldcat.org/entity/work/data/190530701#Topic/photoresists> ; # Photoresists
   schema:about <http://id.worldcat.org/fast/1019883> ; # Microlithography
   schema:about <http://experiment.worldcat.org/entity/work/data/190530701#Topic/microelectronics> ; # Microelectronics
   schema:about <http://dewey.info/class/621.381531/e20/> ;
   schema:about <http://id.worldcat.org/fast/1019757> ; # Microelectronics
   schema:about <http://id.worldcat.org/fast/1062099> ; # Photoresists
   schema:about <http://experiment.worldcat.org/entity/work/data/190530701#Topic/microlithography> ; # Microlithography
   schema:about <http://id.worldcat.org/fast/1011095> ; # Masks (Electronics)
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/150693656> ; # Electrochemical Society. Electronics Division.
   schema:contributor <http://viaf.org/viaf/73017072> ; # George J. Hefferon
   schema:contributor <http://viaf.org/viaf/33692779> ; # Robert Gleason
   schema:contributor <http://viaf.org/viaf/138976864> ; # Electrochemical Society. Dielectrics and Insulation Division.
   schema:contributor <http://viaf.org/viaf/68091194> ; # L. K. White
   schema:contributor <http://viaf.org/viaf/135801592> ; # Electrochemical Society. Luminescence and Display Materials Group.
   schema:copyrightYear "1990" ;
   schema:creator <http://experiment.worldcat.org/entity/work/data/190530701#Meeting/international_symposium_on_patterning_science_and_technology_1st_1989_hollywood_fla> ; # International Symposium on Patterning Science and Technology (1st : 1989 : Hollywood, Fla.)
   schema:datePublished "1990" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/190530701> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/190530701#Series/proceedings_electrochemical_society> ; # Proceedings (Electrochemical Society) ;
   schema:name "Proceedings of the Symposium on Patterning Science and Technology"@en ;
   schema:productID "21409932" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/21409932#PublicationEvent/pennington_nj_10_s_main_st_pennington_08534_2896_electrochemical_society_1990> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/190530701#Agent/electrochemical_society> ; # Electrochemical Society
   schema:url <http://www.gbv.de/dms/tib-ub-hannover/017289572.pdf> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/21409932> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/190530701#Agent/electrochemical_society> # Electrochemical Society
    a bgn:Agent ;
   schema:name "Electrochemical Society" ;
    .

<http://experiment.worldcat.org/entity/work/data/190530701#CreativeWork/patterning_science_and_technology> # Patterning science and technology.
    a schema:CreativeWork ;
   schema:name "Patterning science and technology." ;
    .

<http://experiment.worldcat.org/entity/work/data/190530701#Meeting/international_symposium_on_patterning_science_and_technology_1st_1989_hollywood_fla> # International Symposium on Patterning Science and Technology (1st : 1989 : Hollywood, Fla.)
    a bgn:Meeting, schema:Event ;
   schema:location <http://experiment.worldcat.org/entity/work/data/190530701#Place/hollywood_fla> ; # Hollywood, Fla.)
   schema:name "International Symposium on Patterning Science and Technology (1st : 1989 : Hollywood, Fla.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/190530701#Place/hollywood_fla> # Hollywood, Fla.)
    a schema:Place ;
   schema:name "Hollywood, Fla.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/190530701#Place/pennington_nj_10_s_main_st_pennington_08534_2896> # Pennington, NJ (10 S. Main St., Pennington 08534-2896)
    a schema:Place ;
   schema:name "Pennington, NJ (10 S. Main St., Pennington 08534-2896)" ;
    .

<http://experiment.worldcat.org/entity/work/data/190530701#Series/proceedings_electrochemical_society> # Proceedings (Electrochemical Society) ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/21409932> ; # Proceedings of the Symposium on Patterning Science and Technology
   schema:name "Proceedings (Electrochemical Society) ;" ;
   schema:name "Proceedings / Electrochemical Society ;" ;
    .

<http://id.worldcat.org/fast/1011095> # Masks (Electronics)
    a schema:Intangible ;
   schema:name "Masks (Electronics)"@en ;
    .

<http://id.worldcat.org/fast/1019757> # Microelectronics
    a schema:Intangible ;
   schema:name "Microelectronics"@en ;
    .

<http://id.worldcat.org/fast/1019883> # Microlithography
    a schema:Intangible ;
   schema:name "Microlithography"@en ;
    .

<http://id.worldcat.org/fast/1062099> # Photoresists
    a schema:Intangible ;
   schema:name "Photoresists"@en ;
    .

<http://viaf.org/viaf/135801592> # Electrochemical Society. Luminescence and Display Materials Group.
    a schema:Organization ;
   schema:name "Electrochemical Society. Luminescence and Display Materials Group." ;
    .

<http://viaf.org/viaf/138976864> # Electrochemical Society. Dielectrics and Insulation Division.
    a schema:Organization ;
   schema:name "Electrochemical Society. Dielectrics and Insulation Division." ;
    .

<http://viaf.org/viaf/150693656> # Electrochemical Society. Electronics Division.
    a schema:Organization ;
   schema:name "Electrochemical Society. Electronics Division." ;
    .

<http://viaf.org/viaf/33692779> # Robert Gleason
    a schema:Person ;
   schema:birthDate "1950" ;
   schema:familyName "Gleason" ;
   schema:givenName "Robert" ;
   schema:name "Robert Gleason" ;
    .

<http://viaf.org/viaf/68091194> # L. K. White
    a schema:Person ;
   schema:familyName "White" ;
   schema:givenName "L. K." ;
   schema:name "L. K. White" ;
    .

<http://viaf.org/viaf/73017072> # George J. Hefferon
    a schema:Person ;
   schema:familyName "Hefferon" ;
   schema:givenName "George J." ;
   schema:name "George J. Hefferon" ;
    .


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