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Proceedings of the Symposium on Silicon Nitride Thin Insulating Films

Author: Vikram J Kapoor; Herman J Stein; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
Publisher: Pennington, N.J. (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, ©1983.
Series: Proceedings (Electrochemical Society), v. 83-8.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Vikram J Kapoor; Herman J Stein; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
OCLC Number: 10350412
Notes: Papers presented at the symposium held May 11-13, 1983 in San Francisco, Calif.
Description: ix, 519 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 83-8.
Responsibility: edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

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