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Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing

Author: Joseph B Anthony; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1988.
Series: Proceedings (Electrochemical Society), v. 88-13.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Symposium on Automated Integrated Circuits Manufacturing (3rd : 1987 : Honolulu, Hawaii).
Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing.
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1988
(OCoLC)613154564
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Joseph B Anthony; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
OCLC Number: 19124347
Notes: Spine title: Automated integrated circuits manufacturing.
Co-sponsored by the Electronics and Dielectrics and Insulation Divisions.
Description: viii, 484 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 88-13.
Other Titles: Automated integrated circuits manufacturing.
Responsibility: edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller.

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