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Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA

Author: Kenneth W Tobin; Iraj Emami; Society of Photo-optical Instrumentation Engineers.; SPIE Digital Library.
Publisher: Bellingham, Wash., USA : SPIE, ©2003.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 5041.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Congresses
Additional Physical Format: (OCoLC)52842148
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Kenneth W Tobin; Iraj Emami; Society of Photo-optical Instrumentation Engineers.; SPIE Digital Library.
ISBN: 081944846X 9780819448460
OCLC Number: 53837867
Notes: Earlier conference called: Design, process integration, and characterization for microelectronics.
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: x, 222 pages : illustrations (some color) ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 5041.
Responsibility: Kenneth W. Tobin, Jr., Iraj Emami, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

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