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A production-compatible microelectronic test pattern for evaluating photomask misalignment

Autor T J Russell; Dwight A Maxwell; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
Vydavatel: Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979.
Edice: Semiconductor measurement technology.; NBS special publication, 400-51.
Vydání/formát:   book_printbook : EnglishZobrazit všechny vydání a formáty
Databáze:WorldCat
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Detaily

Doplňující formát: Online version:
Russell, T.J. (Thomas James), 1943-
Production-compatible microelectronic test pattern for evaluating photomask misalignment.
Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979
(OCoLC)633088701
Typ dokumentu: Book
Všichni autoři/tvůrci: T J Russell; Dwight A Maxwell; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
OCLC číslo: 4591321
Popis: iii, 28 pages : illustrations ; 26 cm.
Název edice: Semiconductor measurement technology.; NBS special publication, 400-51.
Odpovědnost: T.J. Russell, D.A. Maxwell ; sponsored by the National Bureau of Standards and Advanced Research Projects Agency.

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