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A production-compatible microelectronic test pattern for evaluating photomask misalignment

저자: T J Russell; Dwight A Maxwell; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
출판사: Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979.
시리즈: Semiconductor measurement technology.; NBS special publication, 400-51.
판/형식:   인쇄본 : 영어모든 판과 형식 보기
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추가적인 물리적 형식: Online version:
Russell, T.J. (Thomas James), 1943-
Production-compatible microelectronic test pattern for evaluating photomask misalignment.
Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979
(OCoLC)633088701
문서 유형 도서
모든 저자 / 참여자: T J Russell; Dwight A Maxwell; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
OCLC 번호: 4591321
설명: iii, 28 pages : illustrations ; 26 cm.
일련 제목: Semiconductor measurement technology.; NBS special publication, 400-51.
책임: T.J. Russell, D.A. Maxwell ; sponsored by the National Bureau of Standards and Advanced Research Projects Agency.

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