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Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density

Author: T J Russell; Air Force Wright Aeronautical Laboratories.; United States. Naval Air Systems Command.; United States. National Bureau of Standards.
Publisher: Washington, DC : U.S. Dept. of Commerce, National Bureau of Standards ; [Springfield, VA] : [National Technical Information Service, distributor], [1982]
Series: NBSIR, 81-2413.
Edition/Format:   Print book : National government publication : EnglishView all editions and formats
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Material Type: Government publication, National government publication
Document Type: Book
All Authors / Contributors: T J Russell; Air Force Wright Aeronautical Laboratories.; United States. Naval Air Systems Command.; United States. National Bureau of Standards.
OCLC Number: 9528296
Notes: "January 1982."
Description: iv, 36 pages : illustrations ; 28 cm.
Series Title: NBSIR, 81-2413.
Responsibility: T.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command.

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