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Scaling issues and design of MEMS

Author: S Baglio; Salvatore Castorina; Nicolò Savalli
Publisher: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, ©2007.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:
"This volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling and modelling design and experimental characterization of a wide range
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Details

Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: S Baglio; Salvatore Castorina; Nicolò Savalli
ISBN: 9780470016992 047001699X
OCLC Number: 171152294
Description: xiii, 229 pages : illustrations ; 24 cm
Contents: 1. Scaling of MEMS --
2. Scaling of microactuators --
an overview --
3. Scaling of thermal sensors --
4. Inductive sensors for magnetic fields --
5. Scaling of mechanical sensors --
6. Scaling of energy sources --
7. Technologies and architectures for autonomous MEMS microrobots --
8. Moving towards the nanoscale --
9. Examples of scaling effects analysis --
DIEES-MEMSLAB --
10. Concluding remarks.
Other Titles: Scaling issues and design of microelectromechanical systems
Responsibility: Salvatore Baglio, Salvatore Castorina, Nicolò Savalli.
More information:

Abstract:

The book has a broad appeal based upon an inter-disciplinary and novel approach. The book's main idea of using a microrobot as a vehicle for a microsystem scaling study introduces the theoretical and  Read more...

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   schema:description ""With an original approach, this informative text encompasses the entire range of themes currently at the forefront of MEMS, including an analysis of the important issue of energy sources in MEMS. In addition, the book explores contemporary research into the design of complete MEMS with a Case Study on colonies of microbots." "Scaling Issues and Design of MEMS aims to improve the reader's basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science."--Jacket."@en ;
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