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Second International Symposium on Laser Precision Microfabrication, 16-18 May 2001, Singapore

Author: Isamu Miyamoto; Japan Laser Processing Society.; United States. Air Force. Asian Office of Aerospace Research and Development.; High Temperature Society of Japan.; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©2002.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 4426.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Isamu Miyamoto; Japan Laser Processing Society.; United States. Air Force. Asian Office of Aerospace Research and Development.; High Temperature Society of Japan.; Society of Photo-optical Instrumentation Engineers.
ISBN: 0819441376 9780819441379
OCLC Number: 49533365
Description: xvii, 498 pages : illustrations ; 28 cm.
Contents: Overview --
Fundamental aspects --
Ultrafast laser processing --
Optics fabrication --
Microfabrication and microstructuring --
Microsystems and microelements --
Pulsed laser deposition --
Modification --
Cleaning --
Industrial applications --
Advanced microfabrication technology.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 4426.
Other Titles: International Symposium on Laser Precision Microfabrication
Laser precision microfabrication
Responsibility: Isamu Miyamoto [and others] chairs/editors ; organized by JLPS--Japan Laser Processing Society [and others] ; sponsored by USAFOSR AOARD--U.S. Airforce [sic] Office of Scientific Research, Asian Office of Aerospace Research and Development, MST--Foundation for Promotion of Material Science and Technology of Japan, DSI--Data Storage Institute (Singapore) ; cooperating organizations, HTS--High Temperature Society of Japan [and others].

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