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Selected papers on optical microlithography

Author: Harry L Stover
Publisher: Bellingham, Wash. : SPIE Optical Engineering Press, ©1992.
Series: SPIE milestones series, v. MS 55.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
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Additional Physical Format: Online version:
Selected papers on optical microlithography.
Bellingham, Wash. : SPIE Optical Engineering Press, ©1992
(OCoLC)714686862
Document Type: Book
All Authors / Contributors: Harry L Stover
ISBN: 0819409855 9780819409850 0819409863 9780819409867
OCLC Number: 25965507
Notes: Papers originally published in various journals, 1974-1991.
Description: xviii, 676 pages : illustrations ; 28 cm.
Series Title: SPIE milestones series, v. MS 55.
Other Titles: Optical microlithography
Responsibility: Harry L. Stover, editor.

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