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SEM microcharacterization of semiconductors

Author: D B Holt; David C Joy
Publisher: London [England] ; San Diego, CA : Academic, ©1989.
Series: Techniques of physics, 12.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
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Additional Physical Format: Online version:
SEM microcharacterization of semiconductors.
London [England] ; San Diego, CA : Academic, ©1989
(OCoLC)714760505
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: D B Holt; David C Joy
ISBN: 0123538556 9780123538550
OCLC Number: 19355053
Description: xiii, 452 pages : illustrations ; 24 cm.
Contents: Foundations of microcharacterization in electron beam instruments --
Quantitation and the interpretation of signals in the individual modes.
Series Title: Techniques of physics, 12.
Other Titles: S.E.M. microcharacterization of semiconductors
Responsibility: edited by D.B. Holt, D.C. Joy.

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