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Semiconductor integrated circuit processing technology

Author: W R Runyan; Kenneth E Bean
Publisher: Reading, Mass. : Addison-Wesley, ©1990.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
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Additional Physical Format: Online version:
Runyan, W.R.
Semiconductor integrated circuit processing technology.
Reading, Mass. : Addison-Wesley, ©1990
(OCoLC)644710940
Document Type: Book
All Authors / Contributors: W R Runyan; Kenneth E Bean
ISBN: 0201108313 9780201108316
OCLC Number: 19321670
Description: xviii, 683 pages : illustrations ; 25 cm
Contents: Historical overview --
Processing overview --
Thermal oxidation of silicon --
Definition of inorganic thin films --
Lithography --
Etching --
Epitaxy --
Impurity diffusion --
Ion implantation --
Ohmic contacts, Schottky barriers, and interconnects --
Yields and yield analysis.
Responsibility: W.R. Runyan, K.E. Bean.

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Primary Entity

<http://www.worldcat.org/oclc/19321670> # Semiconductor integrated circuit processing technology
    a schema:CreativeWork, schema:Book ;
    library:oclcnum "19321670" ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/21354963#Place/reading_mass> ; # Reading, Mass.
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/mau> ;
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/halbleiterschaltung> ; # Halbleiterschaltung
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/semicondutores_elementares> ; # Semicondutores elementares
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/integrierte_schaltung> ; # Integrierte Schaltung
    schema:about <http://dewey.info/class/621.38173/e19/> ;
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/integrated_circuits_design_and_construction> ; # Integrated circuits--Design and construction
    schema:about <http://id.loc.gov/authorities/subjects/sh85067118> ; # Integrated circuits--Design and construction
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/semiconductors_design_and_construction> ; # Semiconductors--Design and construction
    schema:about <http://id.worldcat.org/fast/975545> ; # Integrated circuits--Design and construction
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/halbleitertechnologie> ; # Halbleitertechnologie
    schema:about <http://experiment.worldcat.org/entity/work/data/21354963#Topic/circuitos_integrados> ; # Circuitos integrados
    schema:about <http://id.worldcat.org/fast/1112213> ; # Semiconductors--Design and construction
    schema:bookFormat bgn:PrintBook ;
    schema:contributor <http://experiment.worldcat.org/entity/work/data/21354963#Person/bean_kenneth_e> ; # Kenneth E. Bean
    schema:copyrightYear "1990" ;
    schema:creator <http://experiment.worldcat.org/entity/work/data/21354963#Person/runyan_w_r> ; # W. R. Runyan
    schema:datePublished "1990" ;
    schema:description "Historical overview -- Processing overview -- Thermal oxidation of silicon -- Definition of inorganic thin films -- Lithography -- Etching -- Epitaxy -- Impurity diffusion -- Ion implantation -- Ohmic contacts, Schottky barriers, and interconnects -- Yields and yield analysis."@en ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/21354963> ;
    schema:inLanguage "en" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/644710940> ;
    schema:name "Semiconductor integrated circuit processing technology"@en ;
    schema:productID "19321670" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/19321670#PublicationEvent/reading_mass_addison_wesley_1990> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/21354963#Agent/addison_wesley> ; # Addison-Wesley
    schema:workExample <http://worldcat.org/isbn/9780201108316> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/19321670> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/21354963#Agent/addison_wesley> # Addison-Wesley
    a bgn:Agent ;
    schema:name "Addison-Wesley" ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Person/bean_kenneth_e> # Kenneth E. Bean
    a schema:Person ;
    schema:familyName "Bean" ;
    schema:givenName "Kenneth E." ;
    schema:name "Kenneth E. Bean" ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Person/runyan_w_r> # W. R. Runyan
    a schema:Person ;
    schema:familyName "Runyan" ;
    schema:givenName "W. R." ;
    schema:name "W. R. Runyan" ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Place/reading_mass> # Reading, Mass.
    a schema:Place ;
    schema:name "Reading, Mass." ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/circuitos_integrados> # Circuitos integrados
    a schema:Intangible ;
    schema:name "Circuitos integrados"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/halbleiterschaltung> # Halbleiterschaltung
    a schema:Intangible ;
    schema:name "Halbleiterschaltung"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/halbleitertechnologie> # Halbleitertechnologie
    a schema:Intangible ;
    schema:name "Halbleitertechnologie"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/integrated_circuits_design_and_construction> # Integrated circuits--Design and construction
    a schema:Intangible ;
    schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/integrierte_schaltung> # Integrierte Schaltung
    a schema:Intangible ;
    schema:name "Integrierte Schaltung"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/semiconductors_design_and_construction> # Semiconductors--Design and construction
    a schema:Intangible ;
    schema:hasPart <http://id.loc.gov/authorities/subjects/sh85119903> ;
    schema:name "Semiconductors--Design and construction"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/21354963#Topic/semicondutores_elementares> # Semicondutores elementares
    a schema:Intangible ;
    schema:name "Semicondutores elementares"@en ;
    .

<http://id.loc.gov/authorities/subjects/sh85067118> # Integrated circuits--Design and construction
    a schema:Intangible ;
    schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/1112213> # Semiconductors--Design and construction
    a schema:Intangible ;
    schema:name "Semiconductors--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/975545> # Integrated circuits--Design and construction
    a schema:Intangible ;
    schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://worldcat.org/isbn/9780201108316>
    a schema:ProductModel ;
    schema:isbn "0201108313" ;
    schema:isbn "9780201108316" ;
    .

<http://www.worldcat.org/oclc/644710940>
    a schema:CreativeWork ;
    rdfs:label "Semiconductor integrated circuit processing technology." ;
    schema:description "Online version:" ;
    schema:isSimilarTo <http://www.worldcat.org/oclc/19321670> ; # Semiconductor integrated circuit processing technology
    .


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