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Semiconductor integrated circuit processing technology

Author: W R Runyan; Kenneth E Bean
Publisher: Reading, Mass. : Addison-Wesley, ©1990.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
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Additional Physical Format: Online version:
Runyan, W.R.
Semiconductor integrated circuit processing technology.
Reading, Mass. : Addison-Wesley, ©1990
(OCoLC)644710940
Document Type: Book
All Authors / Contributors: W R Runyan; Kenneth E Bean
ISBN: 0201108313 9780201108316
OCLC Number: 19321670
Description: xviii, 683 pages : illustrations ; 25 cm
Contents: Historical overview --
Processing overview --
Thermal oxidation of silicon --
Definition of inorganic thin films --
Lithography --
Etching --
Epitaxy --
Impurity diffusion --
Ion implantation --
Ohmic contacts, Schottky barriers, and interconnects --
Yields and yield analysis.
Responsibility: W.R. Runyan, K.E. Bean.

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