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Semiconductor measurement technology: quarterly report.

Author: Institute for Applied Technology (U.S.). Electronic Technology Division.
Publisher: [Washington] U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.]
Series: NBS special publication.
Edition/Format:   Journal, magazine : Periodical : National government publication : EnglishView all editions and formats
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Genre/Form: Periodicals
Additional Physical Format: Online version:
Institute for Applied Technology (U.S.). Electronic Technology Division.
Semiconductor measurement technology: quarterly report
(OCoLC)733871140
Material Type: Government publication, National government publication, Periodical
Document Type: Journal / Magazine / Newspaper
All Authors / Contributors: Institute for Applied Technology (U.S.). Electronic Technology Division.
ISSN:0145-4676
OCLC Number: 2743984
Notes: Title varies slightly.
Description: v. ill. 26 cm.
Series Title: NBS special publication.
Other Titles: Semiconductor measurement technology. Quarterly report

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