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Silicides for VLSI Applications.

Author: Shyam P Murarka
Publisher: Oxford : Elsevier Science, 1983.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Murarka, Shyam P.
Silicides for VLSI Applications.
Oxford : Elsevier Science, ©1983
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Shyam P Murarka
ISBN: 9780080570563 0080570569
OCLC Number: 830167070
Description: 1 online resource (213 pages)
Contents: Front Cover; Silicides for VLSI Applications; Copyright Page; Dedication; Table of Contents; Preface; Acknowledgments; CHAPTER I. INTRODUCTION; A. Overview; B. MOS Devices-RC Delay and Speed at the Gate and Interconnection Leve; C. Schottky Barrier Devices; D. Contact Metallization and Contact Resistance; CHAPTER II. PROPERTIES; A. Resistivity; B. Temperature Dependence of Resistivity; C. Crystal Structure; D. Stress; E. Chemical Reactivity; CHAPTER III. THERMODYNAMIC CONSIDERATIONS; A. Heats of Formation {AHf) of Silicides; B. Binary Phase Diagrams and Intermetallic Compound Formation. C. Mutual Solid Solubilities and DiffusivitiesD. Electromigration Resistance; CHAPTER IV. FORMATION; A. Intermetallic Compound Formation-Kinetics; B. Intermetallic Compound Formation-Effect of Impurities; C. Silicide Formation-Experimental Techniques; CHAPTER V. OXIDATION; A. Overview; B. Experimental Results; C. Oxidation Mechanism; D. Dielectric Breakdown of the Oxide on Silicide; CHAPTER VI. INTEGRATED-CIRCUIT FABRICATION; A. Etching for Pattern Generation; B. Metallization; C. Process Stability of Silicides; CHAPTER VII. SPECIAL APPLICATIONS; A. Shallow Silicide Contacts. B. Epitaxial SilicidesC. Silicon-Rich Disilicides; D. Archival Optical Storage; References; Author Index; Subject Index.

Abstract:

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

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