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Silicon Carbide Microelectromechanical Systems For Harsh Environments.

Author: Razavy, Mohsen.; Rebecca Cheung
Publisher: World Scientific 2006.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students,  Read more...
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Genre/Form: Electronic books
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Razavy, Mohsen.; Rebecca Cheung
ISBN: 1281347566 9781281347565 9781860949098 1860949096
OCLC Number: 815568138
Description: 1 online resource
Contents: Preface ; 1 Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) ; 1 Introduction ; 2 SiC Material Properties ; 3 Making a Microelectromechanical (MEM) Device ; 3.1 Micromachining Processes ; 3.1.1 Bulk micromachining ; 3.1.2 Surface micromachining. 4 Surface Modification 5 Frequency Tuning of the SiC MEMS ; 6 Mechanical Testing of the MEMS ; 7 Application Examples ; 8 Summary ; References ; 2 Deposition Techniques for SiC MEMS ; 1 Introduction ; 2 Deposition Issues Related to SiC for MEMS. 3 Atmospheric Pressure Chemical Vapor Deposition 3.1 Epitaxial 3C-SiC Films ; 3.2 Polycrystalline 3C-SiC Films ; 4 Plasma Enhanced Chemical Vapor Deposition ; 5 Low Pressure Chemical Vapor Deposition ; 5.1 Overview ; 5.2 Epitaxial 3C-SiC Films ; 5.3 Polycrystalline 3C-SiC Films. 6 Doping ofLPCVDPoly-SiC Films 7 Other Deposition Methods ; 8 Conclusions ; References ; 3 Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996 --
2002 ; 1 Introduction ; 2 Thermal Stability ; 2.1 Thermal Stability of Ohmic Contacts. 2.2 Thermal Stability of Rectifying Contacts 3 Ohmic Contacts to p-type SiC ; 3.1 Introduction ; 3.2 Al-based Contacts ; 3.3 Al-free Contacts ; 4 Ohmic Contacts Using Nickel ; 4.1 Introduction ; 4.2 Thermodynamics ; 4.3 Phase Formation Sequence ; 4.4 Issues ; 4.5 Mechanisms.

Abstract:

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

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Linked Data


Primary Entity

<http://www.worldcat.org/oclc/815568138> # Silicon Carbide Microelectromechanical Systems For Harsh Environments.
    a schema:CreativeWork, schema:MediaObject, schema:Book ;
    library:oclcnum "815568138" ;
    schema:about <http://id.worldcat.org/fast/1019745> ; # Microelectromechanical systems
    schema:about <http://id.worldcat.org/fast/1118657> ; # Silicon carbide
    schema:about <http://dewey.info/class/620.193/> ;
    schema:bookFormat schema:EBook ;
    schema:contributor <http://experiment.worldcat.org/entity/work/data/1044417581#Agent/razavy_mohsen> ; # Razavy, Mohsen.
    schema:datePublished "2006" ;
    schema:description "Preface ; 1 Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) ; 1 Introduction ; 2 SiC Material Properties ; 3 Making a Microelectromechanical (MEM) Device ; 3.1 Micromachining Processes ; 3.1.1 Bulk micromachining ; 3.1.2 Surface micromachining."@en ;
    schema:description "This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product."@en ;
    schema:editor <http://viaf.org/viaf/272161908> ; # Rebecca Cheung
    schema:exampleOfWork <http://worldcat.org/entity/work/id/1044417581> ;
    schema:genre "Electronic books"@en ;
    schema:inLanguage "en" ;
    schema:name "Silicon Carbide Microelectromechanical Systems For Harsh Environments."@en ;
    schema:productID "815568138" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/815568138#PublicationEvent/world_scientific2006> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/1044417581#Agent/world_scientific> ; # World Scientific
    schema:url <http://public.ebookcentral.proquest.com/choice/publicfullrecord.aspx?p=1681715> ;
    schema:url <http://www.myilibrary.com?id=134756&ref=toc> ;
    schema:url <http://www.myilibrary.com?id=134756> ;
    schema:url <http://public.eblib.com/choice/publicfullrecord.aspx?p=1681715> ;
    schema:workExample <http://worldcat.org/isbn/9781860949098> ;
    schema:workExample <http://worldcat.org/isbn/9781281347565> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/815568138> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1044417581#Agent/razavy_mohsen> # Razavy, Mohsen.
    a bgn:Agent ;
    schema:name "Razavy, Mohsen." ;
    .

<http://experiment.worldcat.org/entity/work/data/1044417581#Agent/world_scientific> # World Scientific
    a bgn:Agent ;
    schema:name "World Scientific" ;
    .

<http://id.worldcat.org/fast/1019745> # Microelectromechanical systems
    a schema:Intangible ;
    schema:name "Microelectromechanical systems"@en ;
    .

<http://id.worldcat.org/fast/1118657> # Silicon carbide
    a schema:Intangible ;
    schema:name "Silicon carbide"@en ;
    .

<http://viaf.org/viaf/272161908> # Rebecca Cheung
    a schema:Person ;
    schema:familyName "Cheung" ;
    schema:givenName "Rebecca" ;
    schema:name "Rebecca Cheung" ;
    .

<http://worldcat.org/isbn/9781281347565>
    a schema:ProductModel ;
    schema:isbn "1281347566" ;
    schema:isbn "9781281347565" ;
    .

<http://worldcat.org/isbn/9781860949098>
    a schema:ProductModel ;
    schema:isbn "1860949096" ;
    schema:isbn "9781860949098" ;
    .


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