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Silicon front-end junction formation--physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

Author: P Pichler; Materials Research Society. Fall Meeting
Publisher: Warrendale, Pa. : Materials Research Society, ©2004.
Series: Materials Research Society symposia proceedings, v. 810.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: P Pichler; Materials Research Society. Fall Meeting
ISBN: 1558997601 9781558997608
OCLC Number: 56190082
Notes: " ... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--Page xv.
Description: xvi, 494 pages : illustrations ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 810.
Responsibility: editors, Peter Pichler [and others].
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