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Silicon processing for the VLSI era

Author: Stanley Wolf; Richard N Tauber
Publisher: Sunset Beach, Calif. : Lattice Press, ©2000->
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
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Document Type: Book
All Authors / Contributors: Stanley Wolf; Richard N Tauber
ISBN: 0961672161 9780961672164
OCLC Number: 43698493
Notes: JM20000323.
Description: volumes <1-> : illustrations ; 25 cm
Contents: v. 1. Process technology.
Responsibility: Stanley Wolf, Richard N. Tauber.

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