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Smart MEMS and sensor systems
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Smart MEMS and sensor systems

著者: Elena Gaura; Robert M Newman; Michael Kraft; Andrew Flewitt; Davies William de Lima Monteiro
出版商: London : Imperial College Press, ©2006.
版本/格式:   图书 : 英语查看所有的版本和格式
提要:

MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. This book presents readers with the means to understand, evaluate, appreciate and participate in  再读一些...

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材料类型: 互联网资源
文件类型: 书, 互联网资源
所有的著者/提供者: Elena Gaura; Robert M Newman; Michael Kraft; Andrew Flewitt; Davies William de Lima Monteiro
ISBN: 1860944930 9781860944932
OCLC号码: 73502017
描述: xii, 539 p. : ill. ; 24 cm.
内容: Chapter 1 Markets and Applications 1 --
1.1 Technology at Crossroads 1 --
1.2 The Present --
MEMS in the News 2 --
1.3 The Past --
Great Expectations 7 --
1.4 The Future --
Maturity and Pervasive Applications 10 --
1.5 Drivers for Progress 13 --
1.6 Progress --
Device Improvement 15 --
1.7 Progress --
Device Integration 18 --
1.8 Smart MEMS --
The Research Agenda 23 --
Chapter 2 Microfabrication Technologies 31 --
2.2 Passive Components 36 --
2.3 Sensing Components 42 --
2.4 Actuating Components 49 --
2.5 Materials and Growth 55 --
2.6 Fabrication Techniques 73 --
Chapter 3 Sensor Electronics 107 --
3.2 Functions of a Sensor System 108 --
3.3 Analogue and Digital Design Options 131 --
3.4 Digital Signal Processing 137 --
3.5 Interface Configurations for Different Transducer Types 143 --
3.6 Integration 152 --
3.7 Design for Power Awareness 158 --
Chapter 4 Sensor Signal Enhancement 173 --
4.1 Errors in Sensor Systems and Measurement Quality (Non-linearity, Cross-sensitivity, Offset, Parameter Drift) 174 --
4.2 Sensor Calibration and Compensation --
Techniques and Examples 187 --
4.3 System Design Choices for Compensation --
Closed Loop Configurations and other Designs 225 --
4.4 Summing up on Sensor Calibration and Compensation 226 --
Chapter 5 Case Study: Control Systems for Capacitive Inertial Sensors 233 --
5.2 Open Loop Accelerometer 235 --
5.3 Closed Loop Accelerometer 243 --
Chapter 6 Case Study: Adaptive Optics and Smart VLSI/MEMS Systems 273 --
6.2 Adaptive Optics and MEMS Systems 274 --
6.3 Operational Principles 276 --
6.4 Device Implementation 283 --
6.5 Closed-loop Adaptive Optical System 294 --
6.6 Conclusions and Future Trends 299 --
Chapter 7 Artificial Intelligence Techniques for Microsensors Identification and Compensation 305 --
7.1 Artificial Neural Networks: What They are and How They are Used for Microsensor Control and Identification 305 --
7.2 Open Loop, Neural Transducer Prototype for Static/Low Frequency Applications 315 --
7.3 Closed-loop Neural Network Controlled Accelerometer 331 --
7.4 The Neural Network Non-linear Gain Controller 337 --
7.5 Micromachined Sensor Identification Using Neural Networks 348 --
Chapter 8 Smart, Intelligent and Cogent MEMS Based Sensors 369 --
8.2 Smart, Intelligent and Cogent Sensors --
What do the Terms Mean 370 --
8.3 What and Where is the Added Value Brought by Intelligence? 379 --
8.4 ANNs and MEMS 382 --
8.5 AI for MEMS Intelligence 390 --
8.6 'Cogent' Sensors --
Fault Detection Case Study 403 --
Chapter 9 Sensor Arrays and Networks 417 --
9.1 Potential of Sensor Arrays 417 --
9.2 Node Design 420 --
9.3 An Architectural History of Sensor Arrays and Networks 425 --
9.4 Systems Design Issues 440 --
9.5 Network Technology and Topology 443 --
Chapter 10 Wireless and Ad Hoc Sensor Networks 465 --
10.1 Sensor Network Applications 466 --
10.2 System Designers' Role 472 --
10.3 Design Assumptions for Ad hoc Networks 475 --
10.4 Distributed System Design Philosophy 477 --
10.5 Network Design Considerations 481 --
10.6 Layered Model 485 --
10.7 Sensor Network Operating Environments 488 --
10.8 Application Services 498 --
10.9 Proposed Sensor Support System Architecture 501 --
Chapter 11 Realising the Dream --
A Case Study 509 --
11.2 The Mission 510 --
11.3 Initial Rough Design 513 --
11.4 Sensor Technology 518 --
11.5 Deployment 523 --
11.6 Operation, Control and Communication 525 --
11.7 Querying the Array 526 --
11.8 A Cogent Sensor 527 --
11.9 A World of Applications 530.
责任: Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro.
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