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Smart structures and materials, 2003. Smart electronics, MEMS, bioMEMS, and nanotechnology : 3-5 March, 2003, San Diego, California, USA

Author: V K VaradanLaszlo B KishSociety of Photo-optical Instrumentation Engineers.American Society of Mechanical Engineers.United States. Air Force. Office of Scientific Research.All authors
Publisher: Bellingham, Wash. : SPIE, ©2002.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 5055.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: (OCoLC)52918583
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: V K Varadan; Laszlo B Kish; Society of Photo-optical Instrumentation Engineers.; American Society of Mechanical Engineers.; United States. Air Force. Office of Scientific Research.; SPIE Digital Library.
OCLC Number: 53838107
Notes: Previous conference has subtitle: Smart electronics, MEMS, and nanotechnology.
Reproduction Notes: Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Description: xxiii, 394 pages : illustrations ; 28 cm.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 5055.
Other Titles: Smart electronics, MEMS, bioMEMS, and nanotechnology
Responsibility: Vijay K. Varadan, Laszlo B, Kish, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society for Mechanical Engineers (USA) [and others] ; cooperating organizations, Air Force Office of Scientific Research (USA) [and others].

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