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Sputtering by particle bombardment / 1, Physical sputtering of single-element solids.

Publisher: Berlin ; Heidelberg : Springer, 1981.
Series: Topics in applied physics, 47.
Edition/Format:   Print book : EnglishView all editions and formats
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Document Type: Book
ISBN: 3540105212 9783540105213 0387105212 9780387105215
OCLC Number: 310856723
Description: x, 281 S. : graph. Darst.
Series Title: Topics in applied physics, 47.
Responsibility: ed. by R. Behrisch. With contributions by H.H. Andersen ...

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