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Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications

Author: Rainer Behrisch; Klaus Wittmaack
Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 1991.
Series: Topics in applied physics, 64.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Printed edition:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Rainer Behrisch; Klaus Wittmaack
ISBN: 9783540468813 3540468811
OCLC Number: 259624402
Description: 1 online resource.
Contents: Angular, energy, and mass distribution of sputtered particles --
Charged and excited states of sputtered atoms --
Surface and depth analysis based on sputtering --
Desorption of organic molecules from solid and liquid surfaces induced by particle impact --
Production of microstructures by ion beam sputtering --
Production of thin films by controlled deposition of sputtered material.
Series Title: Topics in applied physics, 64.
Responsibility: by Rainer Behrisch, Klaus Wittmaack.

Abstract:

Sputtering is a widely observed phenomenon that has many applications in today's experimental physics and technology. This text considers the characterization of the sputtered particles and  Read more...

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