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Technical digest : 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007.

Author: Institute of Electrical and Electronics Engineers.
Publisher: Piscataway, NJ : IEEE, ©2007.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Database:WorldCat
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Institute of Electrical and Electronics Engineers.
OCLC Number: 262485957
Notes: Title from PDF of cover title (IEEE Xplore, viewed Oct. 12, 2009).
"IEEE catalog number: 07CH37871."
Description: 1 online resource (xxiv, 898 pages) : illustrations
Other Titles: 20th IEEE International Conference on Micro Electro Mechanical Systems
Micro electro mechanical systems
MEMS 2007 Kobe
IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007
Micro Electro Mechanical Systems, 2007, MEMS, IEEE 20th International Conference on

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