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Technology of integrated circuits

Author: D Widmann; Hermann Mader; H Friedrich, Dr.-Ing.
Publisher: Berlin ; New York : Springer, ©2000.
Series: Springer series in advanced microelectronics.
Edition/Format:   Print book : EnglishView all editions and formats
Database:WorldCat
Summary:
"This book provides expert and comprehensive coverage of current technologies used in the manufacture of VLSI circuits, for process integration up to the Gigabit memory level. It is aimed at advanced students, and also at engineers and scientists working in research, development and production."--Jacket.
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: D Widmann; Hermann Mader; H Friedrich, Dr.-Ing.
ISBN: 3540661999 9783540661993
OCLC Number: 42296518
Description: xvii, 340 pages : illustrations ; 24 cm.
Contents: 1. Introduction --
2. Basic principles of integrated circuits technology --
3. Film technology --
4. Lithography --
5. Etching technology --
6. Doping technology --
7. Cleaning technology --
8. Process integration.
Series Title: Springer series in advanced microelectronics.
Other Titles: Technologie hochintegrierter Schaltungen.
Responsibility: D. Widmann, H. Mader, H. Friedrich.
More information:

Abstract:

A guide to advances in process technologies for IC fabrication. Topics covered include new materials, modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies,  Read more...

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