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Thin film materials technology : sputtering of compound materials

Author: Kiyotaka Wasa; Hideaki Adachi; Makoto Kitabatake
Publisher: Norwich, NY [u.a.] : William Andrew Pub [u.a.], 2004.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Provides technological information on ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative  Read more...

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Kiyotaka Wasa; Hideaki Adachi; Makoto Kitabatake
ISBN: 0815514832 9780815514831 3540211187 9783540211181
OCLC Number: 248964665
Description: XIV, 518 S : zahlr. ill., graph. Darst
Contents: Thin Film Materials And Devices.- Thin Film Processes.- Sputtering Phenomena.- Sputtering Systems.- Deposition Of Compound Thin Films.- Structural Control Of Compound Thin Films.- Microfabrication By Sputtering.- Appendix.- Index.
Responsibility: by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi.
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From the reviews: -The book starts by defining thin film materials and describing the basics of their nucleation and growth. ... I found the book useful and would not hesitate to recommend it as Read more...

 
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