skip to content
Transfer of Fabrication of Universal MEMS Integrated Dual-Spring (UMIDS) Process to a Distributed Fabrication Network. Preview this item
ClosePreview this item
Checking...

Transfer of Fabrication of Universal MEMS Integrated Dual-Spring (UMIDS) Process to a Distributed Fabrication Network.

Author: Michael A Huff; Mehmet Ozgur; CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON VA.
Publisher: Ft. Belvoir : Defense Technical Information Center, 15 AUG 2008.
Edition/Format:   eBook : English
Database:WorldCat
Summary:
Spawar has been developing a process sequence called the "Universal MEMS Integrated Dual-Spring"(UMlDS) for several years. This process has shown promise for the fabrication of extremely sensitive inertial sensor devices. Under this effort, Spawar researchers were tasked with the transfer of the UMIDS process to the DARPA-established MEMS Exchange program at the Corporation for National Research Initiatives (CNRI)  Read more...
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

 

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Material Type: Internet resource
Document Type: Internet Resource
All Authors / Contributors: Michael A Huff; Mehmet Ozgur; CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON VA.
OCLC Number: 318690979
Notes: Final technical rept. Nov 2005-Sep 2007.
Description: 12 p. ; 23 x 29 cm.

Abstract:

Spawar has been developing a process sequence called the "Universal MEMS Integrated Dual-Spring"(UMlDS) for several years. This process has shown promise for the fabrication of extremely sensitive inertial sensor devices. Under this effort, Spawar researchers were tasked with the transfer of the UMIDS process to the DARPA-established MEMS Exchange program at the Corporation for National Research Initiatives (CNRI) in Reston Virginia. Specifically, Spawar provided to the MEMS Exchange the process sequence, device designs, and various process details and parameters to provide a starting point to allow the MEMS Exchange to fabricate accelerators using the UMIDS process. This final report outlines our efforts and the results of the fabrication of the accelerator devices made using the Spawar UMIDS process. The UMIDS process was successfully transferred to the MEMS Exchange.

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


<http://www.worldcat.org/oclc/318690979>
library:oclcnum"318690979"
library:placeOfPublication
library:placeOfPublication
owl:sameAs<info:oclcnum/318690979>
rdf:typeschema:Book
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:about
schema:bookFormatschema:EBook
schema:contributor
schema:contributor
schema:contributor
<http://viaf.org/viaf/265896569>
rdf:typeschema:Organization
schema:name"CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON VA."
schema:datePublished"15 AUG 2008"
schema:datePublished"2008"
schema:description"Spawar has been developing a process sequence called the "Universal MEMS Integrated Dual-Spring"(UMlDS) for several years. This process has shown promise for the fabrication of extremely sensitive inertial sensor devices. Under this effort, Spawar researchers were tasked with the transfer of the UMIDS process to the DARPA-established MEMS Exchange program at the Corporation for National Research Initiatives (CNRI) in Reston Virginia. Specifically, Spawar provided to the MEMS Exchange the process sequence, device designs, and various process details and parameters to provide a starting point to allow the MEMS Exchange to fabricate accelerators using the UMIDS process. This final report outlines our efforts and the results of the fabrication of the accelerator devices made using the Spawar UMIDS process. The UMIDS process was successfully transferred to the MEMS Exchange."@en
schema:exampleOfWork<http://worldcat.org/entity/work/id/195779429>
schema:inLanguage"en"
schema:name"Transfer of Fabrication of Universal MEMS Integrated Dual-Spring (UMIDS) Process to a Distributed Fabrication Network."@en
schema:numberOfPages"12"
schema:publisher
schema:url
schema:url<http://handle.dtic.mil/100.2/ADA485921>

Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.