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Tribology in chemical-mechanical planarization

Author: Hong Liang; David R Craven
Publisher: Boca Raton, Fla. : Taylor & Francis, 2005.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book  Read more...

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Document Type: Book
All Authors / Contributors: Hong Liang; David R Craven
ISBN: 0824725670 9780824725679
OCLC Number: 56419342
Description: 185 pages : illustrations ; 25 cm
Contents: INTRODUCTION Brief History of Tribology CMP Technology Development Basic CMP Process SURFACE PROPERTIES Physical and Mechanical Characteristics of Surfaces Wear-Contact of Material Structure Surface Characterization Techniques CMP Defects FRICTION Basics of Friction Laws of Friction Friction Due to Adhesion Friction Due to Abrasion - Ploughing Friction Due to Deformation Flash Temperatures Friction in CMP LUBRICATION Lubrication Regimes Lubrication Fundamentals Boundary Lubrication in CMP Lubrication Behavior in Post-CMP Cleaning Additive Classification for Slurry Design WEAR IN CMP Basics of Wear Slurry Particles Pad Wear FORCE TRANSMISSION CMP Tour de Force Elastomeric Foams CMP PADS Pad Surface Characteristics Slurry Depletion Pad Conditioning POST-CMP CLEANING
Responsibility: Hong Liang, David Craven.
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Linked Data


Primary Entity

<http://www.worldcat.org/oclc/56419342> # Tribology in chemical-mechanical planarization
    a schema:CreativeWork, schema:Book ;
   library:oclcnum "56419342" ;
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/flu> ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/17126761#Place/boca_raton_fla> ; # Boca Raton, Fla.
   schema:about <http://experiment.worldcat.org/entity/work/data/17126761#Topic/schleifen> ; # Schleifen
   schema:about <http://dewey.info/class/621.92/e22/> ;
   schema:about <http://id.worldcat.org/fast/947952> ; # Grinding and polishing
   schema:about <http://experiment.worldcat.org/entity/work/data/17126761#Topic/tribologie> ; # Tribologie
   schema:about <http://experiment.worldcat.org/entity/work/data/17126761#Topic/friccion_mecanica> ; # Fricción (Mecánica)
   schema:about <http://id.worldcat.org/fast/1742691> ; # Chemical mechanical planarization
   schema:about <http://id.worldcat.org/fast/1156503> ; # Tribology
   schema:about <http://experiment.worldcat.org/entity/work/data/17126761#Topic/esmerilado> ; # Esmerilado
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/65858050> ; # David R. Craven
   schema:creator <http://viaf.org/viaf/44552564> ; # Hong Liang
   schema:datePublished "2005" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/17126761> ;
   schema:inLanguage "en" ;
   schema:name "Tribology in chemical-mechanical planarization"@en ;
   schema:productID "56419342" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/56419342#PublicationEvent/boca_raton_fla_taylor_&_francis_2005> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/17126761#Agent/taylor_&_francis> ; # Taylor & Francis
   schema:workExample <http://worldcat.org/isbn/9780824725679> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/56419342> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/17126761#Agent/taylor_&_francis> # Taylor & Francis
    a bgn:Agent ;
   schema:name "Taylor & Francis" ;
    .

<http://experiment.worldcat.org/entity/work/data/17126761#Place/boca_raton_fla> # Boca Raton, Fla.
    a schema:Place ;
   schema:name "Boca Raton, Fla." ;
    .

<http://experiment.worldcat.org/entity/work/data/17126761#Topic/friccion_mecanica> # Fricción (Mecánica)
    a schema:Intangible ;
   schema:name "Fricción (Mecánica)"@en ;
    .

<http://id.worldcat.org/fast/1156503> # Tribology
    a schema:Intangible ;
   schema:name "Tribology"@en ;
    .

<http://id.worldcat.org/fast/1742691> # Chemical mechanical planarization
    a schema:Intangible ;
   schema:name "Chemical mechanical planarization"@en ;
    .

<http://id.worldcat.org/fast/947952> # Grinding and polishing
    a schema:Intangible ;
   schema:name "Grinding and polishing"@en ;
    .

<http://viaf.org/viaf/44552564> # Hong Liang
    a schema:Person ;
   schema:birthDate "1961" ;
   schema:familyName "Liang" ;
   schema:givenName "Hong" ;
   schema:name "Hong Liang" ;
    .

<http://viaf.org/viaf/65858050> # David R. Craven
    a schema:Person ;
   schema:birthDate "1945" ;
   schema:familyName "Craven" ;
   schema:givenName "David R." ;
   schema:name "David R. Craven" ;
    .

<http://worldcat.org/isbn/9780824725679>
    a schema:ProductModel ;
   schema:isbn "0824725670" ;
   schema:isbn "9780824725679" ;
    .


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