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The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass

Author: Tjalf Pirk
Publisher: Aachen : Shaker, 2008.
Dissertation: Zugl.: Freiburg (Breisgau), Univ., Diss., 2008.
Series: Microfluidics & nanofluidics, Bd. 4.
Edition/Format:   Thesis/dissertation : Thesis/dissertation : English
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Material Type: Thesis/dissertation, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Tjalf Pirk
ISBN: 9783832276447 3832276440
OCLC Number: 297544674
Description: VIII, 155 Seiten : Illustrationen, Diagramme ; 24 cm, 284 gr.
Series Title: Microfluidics & nanofluidics, Bd. 4.
Responsibility: Tjalf Pirk.

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