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The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass

by Tjalf Pirk;
Type:   Thesis/dissertation : Thesis/dissertation
Publisher: Aachen : Shaker, 2008.

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1. 5 Flow- Eng&Tech(book,thesis,e-book)
Items: 498
Updated: 2017-11-17
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