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ULSI process integration IV : proceedings of the international symposium

Author: Cor L Claeys; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Publisher: Pennington, N.J. : Electrochemical Society, ©2005.
Series: Proceedings (Electrochemical Society), v. 2005-06.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Cor L Claeys; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
ISBN: 1566774640 9781566774642
OCLC Number: 61666603
Notes: " ... includes papers that were presented at the Fourth Symposium on ULSI Process Integration held in Québec, Canada during the 207th Meeting of the Electrochemical Society, May 16-20, 2005"--Preface.
Description: xiii, 434 pages : illustrations ; 24 cm.
Series Title: Proceedings (Electrochemical Society), v. 2005-06.
Responsibility: editors, C.L. Claeys [and others] ; sponsoring division, Electronics.

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