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ULSI science and technology/1987 : proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology

Author: S Broydo; C M Osburn; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1987.
Series: Proceedings (Electrochemical Society), v. 87-11.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
International Symposium on Ultra Large Scale Integration Science and Technology (1st : 1987 : Philadelphia, Pa.).
ULSI science and technology/1987.
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, ©1987
(OCoLC)712464607
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: S Broydo; C M Osburn; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
OCLC Number: 18350664
Notes: The Symposium was held May 11-15, 1987 in Philadelphia, Pa., and co-sponsored by the Electronics and Dielectrics & Insulation Divisions of the Electrochemical Society, Inc.
Description: xi, 840 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 87-11.
Responsibility: edited by S. Broydo, C.M. Osburn ; assistant editors, J.M. Andrews [and others].

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