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Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : symposium held April 17-19, 1995, San Francisco, California, U.S.A.

Author: Michael Liehr
Publisher: Pittsburgh, Pa. : Materials Research Society, ©1995.
Series: Materials Research Society symposia proceedings, v. 386.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
San Francisco (Calif., 1995)
Kongreß
Congresses
Additional Physical Format: Online version:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation.
Pittsburgh, Pa. : Materials Research Society, ©1995
(OCoLC)604277606
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Michael Liehr
ISBN: 1558992898 9781558992894
OCLC Number: 32894996
Description: xiii, 411 pages : illustrations ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 386.
Responsibility: editors, Michael Liehr [and others].

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