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Understanding MEMS : principles and applications

Author: Luis Castañer
Publisher: Chichester, UK ; Hoboken, New Jersey : Wiley, 2015.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Database:WorldCat
Summary:

The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with  Read more...

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Genre/Form: Electronic books
Additional Physical Format: Print version:
Castañer, Luis, author.
Understanding MEMS
Chichester, UK ; Hoboken, New Jersey : John Wiley & Sons, 2015
(DLC) 2015024280
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Luis Castañer
ISBN: 9781119055495 1119055490 9781119055433 1119055431 1119055423 9781119055426
OCLC Number: 913957674
Description: 1 online resource.
Contents: Scaling of forces --
Elasticity --
Bending of microstructures --
Piezoresistance and piezoelectricity --
Electrostatic driving and sensing --
Resonators --
Microfluidics and electrokinetics --
Thermal devices --
Fabrication.
Responsibility: Luis Castañer.
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