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A user's guide to vacuum technology

Author: John F O'Hanlon; John Wiley & Sons.
Publisher: Hoboken, NJ : Wiley-Interscience, ©2003.
Edition/Format:   eBook : Document : English : 3rd edView all editions and formats
Summary:

With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, this third edition  Read more...

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Genre/Form: Electronic books
Handbooks and manuals
Handbooks, manuals, etc
Additional Physical Format: Print version:
(DLC) 2003045051
(OCoLC)51892895
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: John F O'Hanlon; John Wiley & Sons.
ISBN: 0471467162 9780471467168 0471467154 9780471467151
OCLC Number: 85820198
Description: 1 online resource (xviii, 516 pages) : illustrations
Contents: Vacuum technology --
Gas properties --
Gas flow --
Gas release from solids --
Pressure gauges --
Flow meters --
Pumping speed --
Residual gas analyzer --
Interpretation of RGA data --
Mechanical pumps --
Turbomolecular pumps --
Diffusion pumps --
Pump fluids --
Getter and ion pumps --
Cryogenic pumps --
Materials in vacuum --
Joints, seals, and valves --
Lubrication --
Rough vacuum pumping --
High vacuum systems --
Ultraclean vacuum systems --
High flow systems --
Multichamber systems --
Leak detection.
Responsibility: John F. O'Hanlon.
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."..an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ("IEEE Circuits & Devices Magazine", May/June 2005)."..clearly written with...many helpful Read more...

 
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