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Vacuum mechatronics : first international workshop, Santa Barbara, CA, 1989

Author: Steven E Belinski; American Vacuum Society.
Publisher: New York : American Institute of Physics, ©1989.
Series: American Vacuum Society series, 7.; AIP conference proceedings, no. 192.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Steven E Belinski; American Vacuum Society.
ISBN: 0883183943 9780883183946
OCLC Number: 496998888
Notes: Papers presented at the First International Vacuum Mechatronics Workshop, held Feb. 2-3, 1989 at the University of California, Santa Barbara.
Description: x, 167 pages : illustrations ; 25 cm.
Series Title: American Vacuum Society series, 7.; AIP conference proceedings, no. 192.
Responsibility: editors, Steven E. Belinski [and others].

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