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VLSI metallization : physics and technologies

Author: Krishna Shenai
Publisher: Boston : Artech House, ©1991.
Series: Artech House materials science library.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

This collection of articles presents developments in VSLI contact and connected technologies and applications. Subjects covered include opto-electronic interconnects and testing, multichip packaging  Read more...

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Genre/Form: Aufsatzsammlung
Additional Physical Format: Online version:
VLSI metallization.
Boston : Artech House, ©1991
(OCoLC)606101343
Document Type: Book
All Authors / Contributors: Krishna Shenai
ISBN: 0890065012 9780890065013
OCLC Number: 22508209
Description: x, 529 pages : illustrations ; 28 cm.
Contents: Device and circuit interconnects - a perspective; physics and modelling of metal-semiconductor heterojunctions; metal/silicide-silicon contacts; multilevel metallization technologies; metallization of compound semiconductors; optoelectronic interconnects and testing; multichip packaging and metallization and reliability.
Series Title: Artech House materials science library.
Responsibility: Krishna Shenai, editor.

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