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Xenon difluoride etching of silicon for MEMS Preview this item
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Xenon difluoride etching of silicon for MEMS

Author: Floy I-Jung Chang
Publisher: 1995.
Dissertation: M.S. University of California, Los Angeles 1995
Edition/Format:   Thesis/dissertation : Thesis/dissertation : Manuscript   Archival Material : English

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Material Type: Thesis/dissertation, Manuscript
Document Type: Book, Archival Material
All Authors / Contributors: Floy I-Jung Chang
OCLC Number: 34531873
Description: xvii, 78 leaves : illustrations ; 28 cm
Responsibility: by Floy I-Jung Chang.


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<> # Floy I-Jung Chang
    a schema:Person ;
   schema:familyName "Chang" ;
   schema:givenName "Floy I-Jung" ;
   schema:name "Floy I-Jung Chang" ;

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