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Xenon difluoride etching of silicon for MEMS

Author: Floy I-Jung Chang
Publisher: 1995.
Dissertation: M.S. University of California, Los Angeles 1995
Edition/Format:   Thesis/dissertation : Thesis/dissertation : Manuscript   Archival Material : English

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Genre/Form: Dissertations, Academic
Material Type: Thesis/dissertation, Manuscript
Document Type: Book, Archival Material
All Authors / Contributors: Floy I-Jung Chang
OCLC Number: 34531873
Description: xvii, 78 leaves : illustrations ; 28 cm
Responsibility: by Floy I-Jung Chang.


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Related Entities

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