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Xenon difluoride etching of silicon for MEMS

Author: Floy I-Jung Chang
Publisher: 1995.
Dissertation: Thesis (M.S.)--University of California, Los Angeles, 1995.
Edition/Format:   Thesis/dissertation : Thesis/dissertation : Manuscript   Archival Material : English
Database:WorldCat
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Material Type: Thesis/dissertation, Manuscript
Document Type: Book, Archival Material
All Authors / Contributors: Floy I-Jung Chang
OCLC Number: 34531873
Description: xvii, 78 leaves : ill. ; 28 cm.
Responsibility: by Floy I-Jung Chang.

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