Dufour Dabadie, Isabelle (1966-....).
Overview
| Works: | 28 works in 30 publications in 2 languages and 34 library holdings |
|---|---|
| Roles: | Other, Opponent, Thesis advisor, Author |
Publication Timeline
.
Most widely held works by
Isabelle Dufour Dabadie
Contribution à l'évolution des procédés de contrôle non destructif par capteurs inductifs : application au cas des matériaux
composites carbone by
Isabelle Dufour Dabadie(
Book
)
2 editions published in 1993 in French and held by 4 WorldCat member libraries worldwide
Cette thèse est consacrée à l'étude des propriétés des capteurs inductifs dans le cadre d'utilisation en contrôle non destructif. L'exposé se décompose en trois phases au cours desquelles sont abordés successivement l'étude des relations entre le capteur et la cible, les problèmes liés à l'instrumentation ainsi que l'aspect traitement du signal. L'interaction entre la grandeur émise par le capteur et l'objet éclairé par le champ, pour des cibles de natures différentes, est abordée dans un premier temps sous l'aspect physique. Les enseignements que l'on tire de ce modèle interne facilitent l'élaboration d'un modèle électrique de type externe simplifié mais suffisamment représentatif pour permettre en temps réel une estimation correcte des propriétés de l'objet à partir des données fournies par le capteur. Les problèmes d'instrumentation sont abordés en s'appuyant sur les notions théoriques dérivées des lois de l'électromagnétisme. Une structure de capteur performante, apte à fournir un compromis entre la portée et la résolution spatiale, est proposée et testée. La dernière partie aborde la résolution du problème inverse dans le cas d'une application au contrôle non destructif des matériaux composites carbone à usage aéronautique. Ce traitement, qui reste compatible avec des cadences de contrôle élevées permet d'estimer la conductivité électrique locale de la cible et la distance d'observation à partir des signaux bruts issus du capteur
2 editions published in 1993 in French and held by 4 WorldCat member libraries worldwide
Cette thèse est consacrée à l'étude des propriétés des capteurs inductifs dans le cadre d'utilisation en contrôle non destructif. L'exposé se décompose en trois phases au cours desquelles sont abordés successivement l'étude des relations entre le capteur et la cible, les problèmes liés à l'instrumentation ainsi que l'aspect traitement du signal. L'interaction entre la grandeur émise par le capteur et l'objet éclairé par le champ, pour des cibles de natures différentes, est abordée dans un premier temps sous l'aspect physique. Les enseignements que l'on tire de ce modèle interne facilitent l'élaboration d'un modèle électrique de type externe simplifié mais suffisamment représentatif pour permettre en temps réel une estimation correcte des propriétés de l'objet à partir des données fournies par le capteur. Les problèmes d'instrumentation sont abordés en s'appuyant sur les notions théoriques dérivées des lois de l'électromagnétisme. Une structure de capteur performante, apte à fournir un compromis entre la portée et la résolution spatiale, est proposée et testée. La dernière partie aborde la résolution du problème inverse dans le cas d'une application au contrôle non destructif des matériaux composites carbone à usage aéronautique. Ce traitement, qui reste compatible avec des cadences de contrôle élevées permet d'estimer la conductivité électrique locale de la cible et la distance d'observation à partir des signaux bruts issus du capteur
Développement de microcapteurs chimiques à base de micropoutres dédiés au contrôle de la qualité de l'air : détection
temps réel de Composés Organiques Volatils (COV) by
Frédéric Lochon(
Book
)
2 editions published in 2007 in French and held by 2 WorldCat member libraries worldwide
Dans le but d'améliorer la limite de détection des capteurs chimiques à base de micropoutres, ces travaux ont permis de mettre en évidence différents moyens d'optimisation de ces capteurs. En se limitant pas à l'étude de la sensibilité et en incluant les notions de bruit de mesure, des règles de conception ont été établies. Ainsi, l'étude des pertes dans les micropoutres et l'étude de l'influence des propriétés viscoélastiques de la couche sensible sur ces micropoutres ont permis d'avoir une meilleure connaissance du bruit de mesure. Les modèles développés ont été confrontés à des essais de caractérisation et à des détections d'éthanol et de toluène. Les résultats obtenus ont permis de valider ces modèles et ouvrent donc la voie à une conception plus éclairée de ces capteurs chimiques
2 editions published in 2007 in French and held by 2 WorldCat member libraries worldwide
Dans le but d'améliorer la limite de détection des capteurs chimiques à base de micropoutres, ces travaux ont permis de mettre en évidence différents moyens d'optimisation de ces capteurs. En se limitant pas à l'étude de la sensibilité et en incluant les notions de bruit de mesure, des règles de conception ont été établies. Ainsi, l'étude des pertes dans les micropoutres et l'étude de l'influence des propriétés viscoélastiques de la couche sensible sur ces micropoutres ont permis d'avoir une meilleure connaissance du bruit de mesure. Les modèles développés ont été confrontés à des essais de caractérisation et à des détections d'éthanol et de toluène. Les résultats obtenus ont permis de valider ces modèles et ouvrent donc la voie à une conception plus éclairée de ces capteurs chimiques
Conception et réalisation d'un microgénérateur piézoélectrique basse fréquence pour pacemaker sans fil by
Mikaël Colin(
)
1 edition published in 2016 in French and held by 2 WorldCat member libraries worldwide
The field of cardiac assistance is currently experiencing a new technological breakthrough with the introduction of the leadless pacemaker. With these new devices, the care of patients is simplified. Furthermore, removal of the leads should allow a drastic reduction of the problems encountered with conventional pacemakers. However, the question of the energy supply remains. In this thesis, we try to provide a solution based on piezoelectric inertial micro-generator in order to harvest a portion of the heartbeat vibrational energy. The approach is to first define the need and relevance of a solution based on energy scavenging. We then analyze the cardiac signals that were recorded using accelerometers positioned directly on the stimulation site. It is shown that the addressed vibration source (i.e. heartbeats) impose the devices to vibrate at around 16 Hz. These frequencies are extremely low compared to microgenerators presented in the literature (typ.> 100 Hz). Secondly, regardless of technological considerations, and using analytical and numerical models, we identify the optimal device dimensions in order to simultaneously meet the specifications in terms of size and required harvested power. This optimization phase shows that a trade-off between resonant frequency and output power must be made and, more particularly, that it leads to the expression of a need in terms of piezoelectric layer thickness to which none of the standard technologies can currently answer. Therefore, we present the work that has been undertaken to develop a technique for producing thick layers of PZT (typ. 15 to 100 µm) by the thinning and the polishing of bulk ceramics. Then, this technique is implemented for the fabrication of our demonstrator: a cantilever of bimorph type vibrating at 16 Hz. Finally, we show that the obtained results (10-15 µW) from heartbeats reproduced in the laboratory are in line with the expressed needs for the implementation of an energy supply solution for leadless pacemakers. This thesis work has been conducted in the frame of the HBS project (Heart Beat Scavenging) especially in collaboration with the company LivaNova - Sorin CRM (Cardiac Rhythm Management). It is highly believed that the original decision to articulate all the tasks that we performed around the end user needs was a key to the success of this work. Indeed, the demonstrators developed in this thesis have subsequently been successfully tested on animals. They also led to a new project whose objectives are to address the reliability and aging of these demonstrators. These new tasks correspond to the continuation of the TRL increase (Technology Readiness Level) to the stages of pre-industrialization
1 edition published in 2016 in French and held by 2 WorldCat member libraries worldwide
The field of cardiac assistance is currently experiencing a new technological breakthrough with the introduction of the leadless pacemaker. With these new devices, the care of patients is simplified. Furthermore, removal of the leads should allow a drastic reduction of the problems encountered with conventional pacemakers. However, the question of the energy supply remains. In this thesis, we try to provide a solution based on piezoelectric inertial micro-generator in order to harvest a portion of the heartbeat vibrational energy. The approach is to first define the need and relevance of a solution based on energy scavenging. We then analyze the cardiac signals that were recorded using accelerometers positioned directly on the stimulation site. It is shown that the addressed vibration source (i.e. heartbeats) impose the devices to vibrate at around 16 Hz. These frequencies are extremely low compared to microgenerators presented in the literature (typ.> 100 Hz). Secondly, regardless of technological considerations, and using analytical and numerical models, we identify the optimal device dimensions in order to simultaneously meet the specifications in terms of size and required harvested power. This optimization phase shows that a trade-off between resonant frequency and output power must be made and, more particularly, that it leads to the expression of a need in terms of piezoelectric layer thickness to which none of the standard technologies can currently answer. Therefore, we present the work that has been undertaken to develop a technique for producing thick layers of PZT (typ. 15 to 100 µm) by the thinning and the polishing of bulk ceramics. Then, this technique is implemented for the fabrication of our demonstrator: a cantilever of bimorph type vibrating at 16 Hz. Finally, we show that the obtained results (10-15 µW) from heartbeats reproduced in the laboratory are in line with the expressed needs for the implementation of an energy supply solution for leadless pacemakers. This thesis work has been conducted in the frame of the HBS project (Heart Beat Scavenging) especially in collaboration with the company LivaNova - Sorin CRM (Cardiac Rhythm Management). It is highly believed that the original decision to articulate all the tasks that we performed around the end user needs was a key to the success of this work. Indeed, the demonstrators developed in this thesis have subsequently been successfully tested on animals. They also led to a new project whose objectives are to address the reliability and aging of these demonstrators. These new tasks correspond to the continuation of the TRL increase (Technology Readiness Level) to the stages of pre-industrialization
Conception, fabrication et caractérisation d'un capteur de conductivité thermique à base de nanofils de silicium by
Jérémie Ruellan(
)
1 edition published in 2015 in French and held by 2 WorldCat member libraries worldwide
Semiconducting nanowires are nowadays the topic of numerous research for their interesting physical properties. Relying more specifically on the thermal properties of nanostructures, the purpose of this thesis is to demonstrate the feasibility of a thermal conductivity detector based on silicon nanowires for pressure sensing (Pirani gauge) or gas detection. The work presented herein addresses the questions raised by the reduction of the objects size such as the increase of the noise or the thermal conduction in a rarefied gas and tries to bring a solution to those problematics. This work deals with all the steps required for the realization of such devices. That is, the design and simulation of the sensor, based on a detailed study of the physical behavior of the objects, the fabrication of such devices on 200mm wafers by the CEA-Leti cleanroom using standard microelectronics processes and finally their characterization as a pressure sensor and gas detector. The work presented here is part of a wider project that aims at developing of a portable gas detection system for air or water analysis
1 edition published in 2015 in French and held by 2 WorldCat member libraries worldwide
Semiconducting nanowires are nowadays the topic of numerous research for their interesting physical properties. Relying more specifically on the thermal properties of nanostructures, the purpose of this thesis is to demonstrate the feasibility of a thermal conductivity detector based on silicon nanowires for pressure sensing (Pirani gauge) or gas detection. The work presented herein addresses the questions raised by the reduction of the objects size such as the increase of the noise or the thermal conduction in a rarefied gas and tries to bring a solution to those problematics. This work deals with all the steps required for the realization of such devices. That is, the design and simulation of the sensor, based on a detailed study of the physical behavior of the objects, the fabrication of such devices on 200mm wafers by the CEA-Leti cleanroom using standard microelectronics processes and finally their characterization as a pressure sensor and gas detector. The work presented here is part of a wider project that aims at developing of a portable gas detection system for air or water analysis
Study and design of MEMS microbalances for bioaerosol detection in indoor environments by
Uğur Soysal(
)
1 edition published in 2019 in English and held by 1 WorldCat member library worldwide
Microfabrication methods are an emerging technology which enables to build micro scale airborne particle mass concentration measurement systems. A personal airborne particle monitoring system can be achieved by combining an appropriate sampling method with inertial micro-electromechanical systems (MEMS) mass sensors. While aerosol sampling methods can take airborne particles from ambient air and transport to a detector in the most efficient way, MEMS provide the detection and estimation of the mass based on a shift in the resonance frequency of oscillating sensors.In this context, an extensive literature review is proposed in order to examine the mass concentration measurement methods from past to present. The methodological tendencies for advanced real-time aerosol mass concentration measurement are evaluated. Finally, bulk-mode silicon-based MEMS mass sensor is chosen to be coupled with an appropriate aerosol sampler.Following that the miniaturization possibilities of aerosol sampling methods are discussed and inertial impactor is chosen as a suitable aerosol sampling method. Then, the impactor is designed, fabricated, and characterized based on the classical impaction theory. The latter, the deposition characteristics of monodisperse aerosol (fluorescent) and bioaerosols (Aspergillus niger, Staphylococcus epidermidis, Pseudomonas fluorescens) are explored by inertial impaction on silicon and nanostructured silicon (i.e. black silicon). The empirical results show that the size of airborne particles plays a key role to determine the deposition characteristics of the impaction by the mechanism of rebound and re-entrainment (i.e. bounce effect) of the particles.In the context of developing an inertial mass sensor, sub-µm air gap MEMS mass sensors have been successfully fabricated based on the thick oxide as a mask layer method. This method enables to fabricate high-aspect-ratio air-gap MEMS resonators. Then, the devices are electrically characterized and the mass resolution is investigated. As a result, high-aspect-ratio MEMS sensors are operated in two different bulk modes (Lamé and extensional modes) and the mass resolution of the sensors is found to be as sub-ng.Finally, the fabricated MEMS mass sensors are integrated into the developed impactor and monodisperse fluorescent particles are successively impacted on the sensors. The shift in the resonance frequency of MEMS mass sensors are evaluated based on Sauerbrey's principle. Ultimately, MEMS mass sensors have achieved to detect and perform mass measurements of the impacted fluorescent particles with a promising precision. Although more impactions are needed to calibrate the sensors, the theoretical mass sensitivity of the device is matched with the experimental mass sensitivity obtained from successive impactions. Therefore, the developed airborne particle detection system paves the way for real-time detection and mass measurements of aerosol and bioaerosols
1 edition published in 2019 in English and held by 1 WorldCat member library worldwide
Microfabrication methods are an emerging technology which enables to build micro scale airborne particle mass concentration measurement systems. A personal airborne particle monitoring system can be achieved by combining an appropriate sampling method with inertial micro-electromechanical systems (MEMS) mass sensors. While aerosol sampling methods can take airborne particles from ambient air and transport to a detector in the most efficient way, MEMS provide the detection and estimation of the mass based on a shift in the resonance frequency of oscillating sensors.In this context, an extensive literature review is proposed in order to examine the mass concentration measurement methods from past to present. The methodological tendencies for advanced real-time aerosol mass concentration measurement are evaluated. Finally, bulk-mode silicon-based MEMS mass sensor is chosen to be coupled with an appropriate aerosol sampler.Following that the miniaturization possibilities of aerosol sampling methods are discussed and inertial impactor is chosen as a suitable aerosol sampling method. Then, the impactor is designed, fabricated, and characterized based on the classical impaction theory. The latter, the deposition characteristics of monodisperse aerosol (fluorescent) and bioaerosols (Aspergillus niger, Staphylococcus epidermidis, Pseudomonas fluorescens) are explored by inertial impaction on silicon and nanostructured silicon (i.e. black silicon). The empirical results show that the size of airborne particles plays a key role to determine the deposition characteristics of the impaction by the mechanism of rebound and re-entrainment (i.e. bounce effect) of the particles.In the context of developing an inertial mass sensor, sub-µm air gap MEMS mass sensors have been successfully fabricated based on the thick oxide as a mask layer method. This method enables to fabricate high-aspect-ratio air-gap MEMS resonators. Then, the devices are electrically characterized and the mass resolution is investigated. As a result, high-aspect-ratio MEMS sensors are operated in two different bulk modes (Lamé and extensional modes) and the mass resolution of the sensors is found to be as sub-ng.Finally, the fabricated MEMS mass sensors are integrated into the developed impactor and monodisperse fluorescent particles are successively impacted on the sensors. The shift in the resonance frequency of MEMS mass sensors are evaluated based on Sauerbrey's principle. Ultimately, MEMS mass sensors have achieved to detect and perform mass measurements of the impacted fluorescent particles with a promising precision. Although more impactions are needed to calibrate the sensors, the theoretical mass sensitivity of the device is matched with the experimental mass sensitivity obtained from successive impactions. Therefore, the developed airborne particle detection system paves the way for real-time detection and mass measurements of aerosol and bioaerosols
Resonant microsystems for hydrogen gas detection without functionalized coating by
Luis Iglesias Hernandez(
)
1 edition published in 2020 in English and held by 1 WorldCat member library worldwide
Hydrogen is a hazardous gas that becomes explosive above a concentration of 4% in air. As a result, many applications where hydrogen is either used or produced require hydrogen sensors to ensure that this limit is never reached. These applications include radioactive waste monitoring, clean energy production or more generally industrial gas monitoring. Most existing sensing devices currently on the market are based on the use of a specifically engineered chemical component or film, which in most cases is not stable over time, lasting usually a few months. This has led to the development of methods that rely on physical sensing mechanisms rather than on chemical ones for the detection of hydrogen: these methods have the advantage of being stable over much longer periods of time. In the context of radioactive waste monitoring, previous work has shown that uncoated (no chemical film) microcantilevers are capable of detecting hydrogen gas up to 0.01% by measuring their change in resonant frequency. This work extends this study by adding the ability to distinguish hydrogen from potential interfering gases. In the case of microcantilevers, gas discrimination is achieved by measuring not only the density of the gas but also its viscosity with the measurement of both the resonant frequency and the quality factor. Capacitive micromachined ultrasonic transducers (CMUTs) have also been used as an alternative to microcantilevers. With the CMUTs, both sound velocity and acoustic attenuation have been measured by a time of flight setup instead of device measurements at resonance. In the case of attenuation measurement, a method for obtaining good selectivity of hydrogen measurement against interfering gases such as carbon dioxide and methane has been developed
1 edition published in 2020 in English and held by 1 WorldCat member library worldwide
Hydrogen is a hazardous gas that becomes explosive above a concentration of 4% in air. As a result, many applications where hydrogen is either used or produced require hydrogen sensors to ensure that this limit is never reached. These applications include radioactive waste monitoring, clean energy production or more generally industrial gas monitoring. Most existing sensing devices currently on the market are based on the use of a specifically engineered chemical component or film, which in most cases is not stable over time, lasting usually a few months. This has led to the development of methods that rely on physical sensing mechanisms rather than on chemical ones for the detection of hydrogen: these methods have the advantage of being stable over much longer periods of time. In the context of radioactive waste monitoring, previous work has shown that uncoated (no chemical film) microcantilevers are capable of detecting hydrogen gas up to 0.01% by measuring their change in resonant frequency. This work extends this study by adding the ability to distinguish hydrogen from potential interfering gases. In the case of microcantilevers, gas discrimination is achieved by measuring not only the density of the gas but also its viscosity with the measurement of both the resonant frequency and the quality factor. Capacitive micromachined ultrasonic transducers (CMUTs) have also been used as an alternative to microcantilevers. With the CMUTs, both sound velocity and acoustic attenuation have been measured by a time of flight setup instead of device measurements at resonance. In the case of attenuation measurement, a method for obtaining good selectivity of hydrogen measurement against interfering gases such as carbon dioxide and methane has been developed
Conception multidisciplinaire de microsystèmes autonomes by
Valérie Dupé(
)
1 edition published in 2011 in French and held by 1 WorldCat member library worldwide
Toute action naturelle crée de l'énergie perdue qui pourrait être exploitée pour alimenter nos appareils électriques et mobiles. Nos environnements physiques disposent d'un nombre élevé de micro-sources d'énergies ; certes chacune est de faible puissance, mais leur multiplicité pourrait s'avérer significative, notamment dans le cadre du fonctionnement de microsystèmes.C'est le principe précédent qui a conduit nos travaux sur la problématique de la conception de microsystèmes autonomes. Ainsi, pour être innovante, l'ingénierie de microsystèmes doit à la fois s'appuyer sur la culture de l'électronique, de la mécanique mais aussi de l'énergétique. Le processus de conception est fortement pluridisciplinaire et son efficacité réside dans la capacité à mettre en œuvre des méthodologies et des outils :- de conception collaborative,- de capitalisation des connaissances techniques, - d'ingénierie multi-physique,- d'ingénierie intégrée.Sur le base de ces fondamentaux, nous avons développé un outil d'aide à la conception. La méthodologie sous-jacente permet :1- l'analyse et la structuration d'un problème de conception d'un microsystème autonome : cette phase conduit l'identification, la description fonctionnelle et environnementale du système et de son environnement.2- la modélisation des connaissances : une analyse architecturale conduit à la description des composants et des interactions liées au microsystème (directement ou indirectement) puis à la modélisation des comportements,3- la qualification énergétique et le couplage physique : la réutilisation structurée des modèles de connaissances est pilotée pour coupler les modèles physiques et décrire les sources, les puits et les mécanismes énergétiques des environnements,4- la conduite de la recherche de concepts innovants : la base de connaissances, les critères de qualification et la description fonctionnelle préalablement construits sont agencés dans une seule méthode de conception virtuelle pour rechercher des concepts de solutions innovants,5- le pré-dimensionnement : tout en assurant l'intégration des outils spécialisés de simulation (méthode des éléments finis et simulation fonctionnelle), le pré-dimensionnement de microsystèmes autonomes est supportée selon un schéma synthétique, assurant un raisonnement abductif (ou bottom-up)La conjonction des raisonnements physiques, l'intégration des méthodes et des cultures métiers, l'exploration virtuelle des espaces de solutions et la modélisation constituent les bases d'un nouveau moyen d'aide à la conception de microsystèmes autonomes. Cette approche a été déployée pour la conception d'un capteur piézoélectrique autonome
1 edition published in 2011 in French and held by 1 WorldCat member library worldwide
Toute action naturelle crée de l'énergie perdue qui pourrait être exploitée pour alimenter nos appareils électriques et mobiles. Nos environnements physiques disposent d'un nombre élevé de micro-sources d'énergies ; certes chacune est de faible puissance, mais leur multiplicité pourrait s'avérer significative, notamment dans le cadre du fonctionnement de microsystèmes.C'est le principe précédent qui a conduit nos travaux sur la problématique de la conception de microsystèmes autonomes. Ainsi, pour être innovante, l'ingénierie de microsystèmes doit à la fois s'appuyer sur la culture de l'électronique, de la mécanique mais aussi de l'énergétique. Le processus de conception est fortement pluridisciplinaire et son efficacité réside dans la capacité à mettre en œuvre des méthodologies et des outils :- de conception collaborative,- de capitalisation des connaissances techniques, - d'ingénierie multi-physique,- d'ingénierie intégrée.Sur le base de ces fondamentaux, nous avons développé un outil d'aide à la conception. La méthodologie sous-jacente permet :1- l'analyse et la structuration d'un problème de conception d'un microsystème autonome : cette phase conduit l'identification, la description fonctionnelle et environnementale du système et de son environnement.2- la modélisation des connaissances : une analyse architecturale conduit à la description des composants et des interactions liées au microsystème (directement ou indirectement) puis à la modélisation des comportements,3- la qualification énergétique et le couplage physique : la réutilisation structurée des modèles de connaissances est pilotée pour coupler les modèles physiques et décrire les sources, les puits et les mécanismes énergétiques des environnements,4- la conduite de la recherche de concepts innovants : la base de connaissances, les critères de qualification et la description fonctionnelle préalablement construits sont agencés dans une seule méthode de conception virtuelle pour rechercher des concepts de solutions innovants,5- le pré-dimensionnement : tout en assurant l'intégration des outils spécialisés de simulation (méthode des éléments finis et simulation fonctionnelle), le pré-dimensionnement de microsystèmes autonomes est supportée selon un schéma synthétique, assurant un raisonnement abductif (ou bottom-up)La conjonction des raisonnements physiques, l'intégration des méthodes et des cultures métiers, l'exploration virtuelle des espaces de solutions et la modélisation constituent les bases d'un nouveau moyen d'aide à la conception de microsystèmes autonomes. Cette approche a été déployée pour la conception d'un capteur piézoélectrique autonome
Transistors à effet de champ : étude des interfaces et amélioration des performances by
Mélanie Devynck(
)
1 edition published in 2012 in French and held by 1 WorldCat member library worldwide
The charge transport and injection are strongly dependant of the semiconductor/dielectric and semi-conductor/electrode interfaces quality. Therefore, this studyfocuses on these interfaces in organic field effect transistors (OFETs). The goal is theunderstanding of the relation between the dielectric (roughness, surface energy) or electrode(work function) characteristics and the OFETs performances.First, we investigate the influence of the interfaces modification by SAMs (SelfAssembled Monolayers) in pentacene based OFETs on silicon substrates. Due to the SAMsgrafting such as OTS8 or OTS, the hydroxyls groups are neutralized and the dielectric showsan apolar surface leading to the reduction of the charge traps density. Moreover, a 2Dpentacene growth with large grains on OTS surface contributes to the decrease of the chargetraps density in the bulk. The threshold voltage, subthreshold swing and hysteresis decreasesgive rise to these modifications. The improvement of the charge transport allows us to reachmobility up to 0.6 cm2/Vs.Then, we investigate the electrode surface treatment by fluorinated SAMs such asPFBT, PFHT or PFDT. The better pentacene layer continuity and the increased electrodework function emphasize the morphologic and electronic influences of the SAMs. Thesemodifications lead to the contact resistance reducing and in consequence to an enhancedmobility up to 0.6 cm2/Vs. Finally, devices with a combination of the interfaces treatmentpresent high mean mobility of 1.3 cm2/Vs.On the final part of this study, we concentrate on low voltage C60 or pentacene basedOFETs on glass substrates. Using a dielectric composed of a high-k dielectric as AlOx and athin layer of a low-k dielectric such as phosphonic SAMs (C8-PA or C18-PA) or polymers(PMMA or PVT) allow us to achieve this low voltage condition. The mobility obtained withn-type OFETs (m = 0.4 cm2/Vs) and the small hysteresis (<0.1 V) in p-type OFETs arepromising
1 edition published in 2012 in French and held by 1 WorldCat member library worldwide
The charge transport and injection are strongly dependant of the semiconductor/dielectric and semi-conductor/electrode interfaces quality. Therefore, this studyfocuses on these interfaces in organic field effect transistors (OFETs). The goal is theunderstanding of the relation between the dielectric (roughness, surface energy) or electrode(work function) characteristics and the OFETs performances.First, we investigate the influence of the interfaces modification by SAMs (SelfAssembled Monolayers) in pentacene based OFETs on silicon substrates. Due to the SAMsgrafting such as OTS8 or OTS, the hydroxyls groups are neutralized and the dielectric showsan apolar surface leading to the reduction of the charge traps density. Moreover, a 2Dpentacene growth with large grains on OTS surface contributes to the decrease of the chargetraps density in the bulk. The threshold voltage, subthreshold swing and hysteresis decreasesgive rise to these modifications. The improvement of the charge transport allows us to reachmobility up to 0.6 cm2/Vs.Then, we investigate the electrode surface treatment by fluorinated SAMs such asPFBT, PFHT or PFDT. The better pentacene layer continuity and the increased electrodework function emphasize the morphologic and electronic influences of the SAMs. Thesemodifications lead to the contact resistance reducing and in consequence to an enhancedmobility up to 0.6 cm2/Vs. Finally, devices with a combination of the interfaces treatmentpresent high mean mobility of 1.3 cm2/Vs.On the final part of this study, we concentrate on low voltage C60 or pentacene basedOFETs on glass substrates. Using a dielectric composed of a high-k dielectric as AlOx and athin layer of a low-k dielectric such as phosphonic SAMs (C8-PA or C18-PA) or polymers(PMMA or PVT) allow us to achieve this low voltage condition. The mobility obtained withn-type OFETs (m = 0.4 cm2/Vs) and the small hysteresis (<0.1 V) in p-type OFETs arepromising
Contribution au développement de microcapteurs intégrés de viscoélasticité de fluides by
Etienne Lemaire(
)
1 edition published in 2013 in French and held by 1 WorldCat member library worldwide
The study of viscoelastic properties has many industrial and academic applications related to "soft matter" like polymers, colloids, surfactants or proteins. The present approach measures these properties in a frequency range from 1 to 100 kHz. The method uses the measurement of the vibration of a microstructure actuated electromagnetically and immersed in the fluid that has to be characterized. The frequency response of the mechanical system, which is measured optically or electrically, is characteristic of the environment in which the structure is immersed in. An analytical method dedicated to microcantilevers for the extraction of the rheological properties has been improved during this PhD thesis.The analytical method developed requires the accuracy of a complex optical system for measuring without artifact the mechanical properties of microcantilever-liquid interaction. Thus opaque liquids cannot be characterized with this sytem. In addition, the measurement cannot easily be integrated. To overcome these difficulties and provide the measurement of viscoelasticity into opaque medium, some strategy was reassessed: (1) “U” shaped microstructures were fabricated; (2) an integrated measurement method was developed and (3) a single frequency method was used to calculate the viscoelasticity.Finally, a viscoelastic and opaque liquid, such as yogurt, has been characterized in situ during the lactic fermentation to demonstrate the validity and the applicability of the method for the real-time monitoring of viscoelasticity
1 edition published in 2013 in French and held by 1 WorldCat member library worldwide
The study of viscoelastic properties has many industrial and academic applications related to "soft matter" like polymers, colloids, surfactants or proteins. The present approach measures these properties in a frequency range from 1 to 100 kHz. The method uses the measurement of the vibration of a microstructure actuated electromagnetically and immersed in the fluid that has to be characterized. The frequency response of the mechanical system, which is measured optically or electrically, is characteristic of the environment in which the structure is immersed in. An analytical method dedicated to microcantilevers for the extraction of the rheological properties has been improved during this PhD thesis.The analytical method developed requires the accuracy of a complex optical system for measuring without artifact the mechanical properties of microcantilever-liquid interaction. Thus opaque liquids cannot be characterized with this sytem. In addition, the measurement cannot easily be integrated. To overcome these difficulties and provide the measurement of viscoelasticity into opaque medium, some strategy was reassessed: (1) “U” shaped microstructures were fabricated; (2) an integrated measurement method was developed and (3) a single frequency method was used to calculate the viscoelasticity.Finally, a viscoelastic and opaque liquid, such as yogurt, has been characterized in situ during the lactic fermentation to demonstrate the validity and the applicability of the method for the real-time monitoring of viscoelasticity
Microsystèmes durables de mesures de concentration d'hydrogène utilisant des micropoutres sans couche sensible by
Mohand-Tayeb Boudjiet(
)
1 edition published in 2015 in French and held by 1 WorldCat member library worldwide
These PhD research tries to meet a need for a reliable and a sustainable hydrogen concentration monitoring in a radioactive environment. In this work, we propose the study and development of resonant silicon microcantilever-based physical hydrogen sensors. The special feature of this sensor is that it does not contain any sensitive and consequently the reliability is improved, compared to devices with sensitive coating. In view of the low density of hydrogen compared to that of air, and the good sensitivity of a resonant microcantilever to the physical properties of the surrounding gas (density and viscosity), the use of vibrating uncoated microcantilever for monitoring hydrogen concentration in air is therefore possible. The objective of this research is to improve the sensitivity and the limit of detection of such sensors. First of all, a study of methods for monitoring small changes in resonant frequency has been conducted in order to determine the method having the best signal to noise ratio, thus, allowing improvement of its resolution in terms of resonant frequency variation measurement. In a second part, a study of the influence of microcantilever geometries and dimensions on their sensitivity to the gas density variation has been performed. As a result, geometrical and dimensional criteria for optimizing the sensitivity to the gas density have been identified. Other factors in a view of improving performance (sensitivity and detection limit) of vibrating microbeams have been studied, such as the influence of the actuating current and bias voltages (electromagnetic actuation and piezoresistive detection) and using high resonant modes. Furthermore, the study of the influence of environmental parameters (temperature and pressure) on the sensors behavior has been established
1 edition published in 2015 in French and held by 1 WorldCat member library worldwide
These PhD research tries to meet a need for a reliable and a sustainable hydrogen concentration monitoring in a radioactive environment. In this work, we propose the study and development of resonant silicon microcantilever-based physical hydrogen sensors. The special feature of this sensor is that it does not contain any sensitive and consequently the reliability is improved, compared to devices with sensitive coating. In view of the low density of hydrogen compared to that of air, and the good sensitivity of a resonant microcantilever to the physical properties of the surrounding gas (density and viscosity), the use of vibrating uncoated microcantilever for monitoring hydrogen concentration in air is therefore possible. The objective of this research is to improve the sensitivity and the limit of detection of such sensors. First of all, a study of methods for monitoring small changes in resonant frequency has been conducted in order to determine the method having the best signal to noise ratio, thus, allowing improvement of its resolution in terms of resonant frequency variation measurement. In a second part, a study of the influence of microcantilever geometries and dimensions on their sensitivity to the gas density variation has been performed. As a result, geometrical and dimensional criteria for optimizing the sensitivity to the gas density have been identified. Other factors in a view of improving performance (sensitivity and detection limit) of vibrating microbeams have been studied, such as the influence of the actuating current and bias voltages (electromagnetic actuation and piezoresistive detection) and using high resonant modes. Furthermore, the study of the influence of environmental parameters (temperature and pressure) on the sensors behavior has been established
Étude de MEMS piézoélectriques libérés et microstructurés par sérigraphie : application à la détection en milieu
gazeux et en milieu liquide by
Christophe Castille(
)
1 edition published in 2010 in French and held by 1 WorldCat member library worldwide
1 edition published in 2010 in French and held by 1 WorldCat member library worldwide
Microrhéomètre sur silicium pour chimie haut débit by
Naser Belmiloud(
)
1 edition published in 2008 in French and held by 1 WorldCat member library worldwide
Cette thèse concerne la construction d'un microrhéomètre. Il assure la mesure des propriétés viscoélastiques linéaires des fluides complexes sur une large gamme de fréquence (de 1Hz à 100kHz). Afin de répondre à la problématique de mesure des propriétés rhéologiques de petites quantités de fluide pour des gammes de fréquence étendues, la dynamique en milieu liquide des microstructures résonantes en silicium a été analysée. A cette échelle micrométrique, les vibrations de micropoutre dépendent non seulement des propriétés de la microstructure (géométrie, matériaux) mais aussi des propriétés du fluide environnant (densité, viscoélasticité). En effet, de façon schématique, la présence du fluide se traduit par deux phénomènes : un phénomène d'inertie ('effet de masse') et un phénomène dissipatif ('effet de pertes visqueuses'). Ainsi l'analyse de la réponse fréquentielle des microstructures mobiles permet de remonter aux propriétés des fluides en fonction de la fréquence
1 edition published in 2008 in French and held by 1 WorldCat member library worldwide
Cette thèse concerne la construction d'un microrhéomètre. Il assure la mesure des propriétés viscoélastiques linéaires des fluides complexes sur une large gamme de fréquence (de 1Hz à 100kHz). Afin de répondre à la problématique de mesure des propriétés rhéologiques de petites quantités de fluide pour des gammes de fréquence étendues, la dynamique en milieu liquide des microstructures résonantes en silicium a été analysée. A cette échelle micrométrique, les vibrations de micropoutre dépendent non seulement des propriétés de la microstructure (géométrie, matériaux) mais aussi des propriétés du fluide environnant (densité, viscoélasticité). En effet, de façon schématique, la présence du fluide se traduit par deux phénomènes : un phénomène d'inertie ('effet de masse') et un phénomène dissipatif ('effet de pertes visqueuses'). Ainsi l'analyse de la réponse fréquentielle des microstructures mobiles permet de remonter aux propriétés des fluides en fonction de la fréquence
Cellules photovoltaïques organiques sur substrat flexible avec électrode supérieure transparente by
Marina Richet(
)
1 edition published in 2019 in French and held by 1 WorldCat member library worldwide
Une cellule photovoltaïque organique est constituée d'une couche photoabsorbante comprise entre deux électrodes dont l'une au moins est transparente. Généralement, les cellules sont illuminées au travers de l'électrode inférieure transparente d'oxyde d'indium dopé à l'étain (ITO). Néanmoins, de nombreuses applications comme l'automobile nécessitant un éclairage par le dessus du module, nous nous sommes intéressés à l'élaboration de cellules photovoltaïques sur substrat flexible, avec l'électrode inférieure opaque et l'électrode transparente déposée sur le dessus de la cellule. Deux types d'architectures ont été développés. Dans le premier cas, la cellule solaire organique finale a été entièrement déposée par des techniques de dépôt en voie liquide avec les deux électrodes en PEDOT:PSS imprimées par jet d'encre. Dans le second cas, les cellules ont été élaborées sur électrode d'argent avec une électrode supérieure transparente tricouche oxyde/métal/oxyde (MoO3/Ag/MoO3) évaporée thermiquement. Les cellules solaires organiques réalisées selon la seconde architecture ont été connectées en série afin de créer un module photovoltaïque organique. Ce dernier a permis d'alimenter et de faire briller une LED
1 edition published in 2019 in French and held by 1 WorldCat member library worldwide
Une cellule photovoltaïque organique est constituée d'une couche photoabsorbante comprise entre deux électrodes dont l'une au moins est transparente. Généralement, les cellules sont illuminées au travers de l'électrode inférieure transparente d'oxyde d'indium dopé à l'étain (ITO). Néanmoins, de nombreuses applications comme l'automobile nécessitant un éclairage par le dessus du module, nous nous sommes intéressés à l'élaboration de cellules photovoltaïques sur substrat flexible, avec l'électrode inférieure opaque et l'électrode transparente déposée sur le dessus de la cellule. Deux types d'architectures ont été développés. Dans le premier cas, la cellule solaire organique finale a été entièrement déposée par des techniques de dépôt en voie liquide avec les deux électrodes en PEDOT:PSS imprimées par jet d'encre. Dans le second cas, les cellules ont été élaborées sur électrode d'argent avec une électrode supérieure transparente tricouche oxyde/métal/oxyde (MoO3/Ag/MoO3) évaporée thermiquement. Les cellules solaires organiques réalisées selon la seconde architecture ont été connectées en série afin de créer un module photovoltaïque organique. Ce dernier a permis d'alimenter et de faire briller une LED
Résonateurs mécaniques pour la mesure de la masse volumique et de la viscosité de liquide by
Martin Heinisch(
)
1 edition published in 2015 in English and held by 1 WorldCat member library worldwide
This thesis summarizes the author's recent work on the topic of mechanical resonators for liquidviscosity and mass density sensing, which were achieved between 2010 and 2015 in the course of aninternational joint doctorate program performed at the Institute for Microelectronics and Microsensorsat the Johannes Kepler University Linz, Austria and the Laboratoire de l'Intégration du Matériau auSystème in Bordeaux, France. In previous studies performed by work groups of both laboratories,the concept of using electrically actuated and read-out mechanical resonators for the determination ofliquids' viscosities and mass densities has been established and elaborated. These works showed that theresonance frequencies and quality factors of immersed resonators are affected by the liquids' viscositiesand mass densities, respectively. The investigated concepts included devices using structured polymeror wet-etched new silver sheets as well as micro-machined silicon and screen-printed PZT resonators.The motivation for investigating and developing such miniaturized resonators was formed, amongstothers, by their capability for in-line, in-situ and handheld-devices for laboratory as well as for industrialapplications. Especially for the latter, physical robustness, long-term stability and reliability,as well as accurate measurement results are basic requirements. To satisfy these requirements andconsidering the results and insights of earlier works, the objectives of this thesis were first, implementingrobust measuring setups featuring long-term stability and high measurement accuracy, where thelatter furthermore requires low cross-sensitivity to temperature. Second, investigating the capabilityof measuring both, a liquid's mass density and viscosity with a single device as well as providing anestimate of achievable measurement accuracies for both quantities. And third, enabling the modelingof the performance of different viscosity and mass density sensors on the one side and their comparisonon the other side. These three specifications were accomplished by following mainly experimental approachesand investigations but also by elaborating the underlying theory of hydrodynamics, structuralmechanics, and electrodynamics. [...]
1 edition published in 2015 in English and held by 1 WorldCat member library worldwide
This thesis summarizes the author's recent work on the topic of mechanical resonators for liquidviscosity and mass density sensing, which were achieved between 2010 and 2015 in the course of aninternational joint doctorate program performed at the Institute for Microelectronics and Microsensorsat the Johannes Kepler University Linz, Austria and the Laboratoire de l'Intégration du Matériau auSystème in Bordeaux, France. In previous studies performed by work groups of both laboratories,the concept of using electrically actuated and read-out mechanical resonators for the determination ofliquids' viscosities and mass densities has been established and elaborated. These works showed that theresonance frequencies and quality factors of immersed resonators are affected by the liquids' viscositiesand mass densities, respectively. The investigated concepts included devices using structured polymeror wet-etched new silver sheets as well as micro-machined silicon and screen-printed PZT resonators.The motivation for investigating and developing such miniaturized resonators was formed, amongstothers, by their capability for in-line, in-situ and handheld-devices for laboratory as well as for industrialapplications. Especially for the latter, physical robustness, long-term stability and reliability,as well as accurate measurement results are basic requirements. To satisfy these requirements andconsidering the results and insights of earlier works, the objectives of this thesis were first, implementingrobust measuring setups featuring long-term stability and high measurement accuracy, where thelatter furthermore requires low cross-sensitivity to temperature. Second, investigating the capabilityof measuring both, a liquid's mass density and viscosity with a single device as well as providing anestimate of achievable measurement accuracies for both quantities. And third, enabling the modelingof the performance of different viscosity and mass density sensors on the one side and their comparisonon the other side. These three specifications were accomplished by following mainly experimental approachesand investigations but also by elaborating the underlying theory of hydrodynamics, structuralmechanics, and electrodynamics. [...]
Diffraction d'ondes de cisaillement en acoustique picoseconde et mesure de leur coécient de réflexion à une interface :
modélisation et expériences by
Alexis Viel(
)
1 edition published in 2017 in French and held by 1 WorldCat member library worldwide
Picosecond optoacoustics is a technique that can probe properties of matter on a submicronscale. The aim of this work is to synthesize shear waves at GHz frequencies in a thin isotropiclayer in order to analyse its shear properties. Transverse waves are synthesized using diffraction.In the first part we develop theoretical tools in order to analyse the spatial repartition of theacoustic field generated by the laser-matter interaction. Directivity patterns predict the particulardirections for which amplitude of the shear waves is higher. Thus, we synthesized shearwaves in these particular directions using a dedicated post processing method. To investigateshear properties of a film lying on the sample, we study the reection of shear waves betweenthe transducer and the lying film. Starting with either simulated or experimental recordedwaveforms, we demonstrate the method in the specific case of the titanium/glycerol interface
1 edition published in 2017 in French and held by 1 WorldCat member library worldwide
Picosecond optoacoustics is a technique that can probe properties of matter on a submicronscale. The aim of this work is to synthesize shear waves at GHz frequencies in a thin isotropiclayer in order to analyse its shear properties. Transverse waves are synthesized using diffraction.In the first part we develop theoretical tools in order to analyse the spatial repartition of theacoustic field generated by the laser-matter interaction. Directivity patterns predict the particulardirections for which amplitude of the shear waves is higher. Thus, we synthesized shearwaves in these particular directions using a dedicated post processing method. To investigateshear properties of a film lying on the sample, we study the reection of shear waves betweenthe transducer and the lying film. Starting with either simulated or experimental recordedwaveforms, we demonstrate the method in the specific case of the titanium/glycerol interface
From atomic level investigations to membrane architecture : an in-depth study of the innovative 3C-SiC/Si/3C-SiC/Si heterostructure by
Rami Khazaka(
)
1 edition published in 2016 in English and held by 1 WorldCat member library worldwide
Le polytype cubique du carbure de silicium (3C-SiC) est un matériau très prometteur pour les applications MEMS. En plus de sa tenue mécanique et chimique, il peut être épitaxié sur des substrats Si de faible coût. De plus, l'hétéroépitaxie multiple, c'est-à-dire quand on empile plusieurs couches Si et 3C-SiC peut ouvrir des pistes pour de nouveaux dispositifs à base de 3C-SiC. Vue la complexité de développer de telles hétérostructures, nous avons procédé à l'amélioration de la qualité de chaque couche séparément. De plus, nous avons mené une étude approfondie sur la nature des défauts dans chaque couche. Après le développement de l'hétérostructure complète, nous avons procédé à la fabrication de microstructures à base de cet empilement. Nous présentons une méthode inédite pour former des membranes de 3C-SiC auto-supportées. Cette technique simplifie considérablement le procédé de fabrication de membranes tout en réduisant le temps de fabrication et le coût. En outre, elle aide à surmonter plusieurs problèmes techniques
1 edition published in 2016 in English and held by 1 WorldCat member library worldwide
Le polytype cubique du carbure de silicium (3C-SiC) est un matériau très prometteur pour les applications MEMS. En plus de sa tenue mécanique et chimique, il peut être épitaxié sur des substrats Si de faible coût. De plus, l'hétéroépitaxie multiple, c'est-à-dire quand on empile plusieurs couches Si et 3C-SiC peut ouvrir des pistes pour de nouveaux dispositifs à base de 3C-SiC. Vue la complexité de développer de telles hétérostructures, nous avons procédé à l'amélioration de la qualité de chaque couche séparément. De plus, nous avons mené une étude approfondie sur la nature des défauts dans chaque couche. Après le développement de l'hétérostructure complète, nous avons procédé à la fabrication de microstructures à base de cet empilement. Nous présentons une méthode inédite pour former des membranes de 3C-SiC auto-supportées. Cette technique simplifie considérablement le procédé de fabrication de membranes tout en réduisant le temps de fabrication et le coût. En outre, elle aide à surmonter plusieurs problèmes techniques
Étude expérimentale de microvannes et microinjecteurs destinés à l'environnement corrosif du gaz naturel : application
à la microchromatographie en phase gazeuse by
Kinda Nachef(
)
1 edition published in 2010 in French and held by 1 WorldCat member library worldwide
This thesis deals with the conception, the fabrication and the study of microvalves, as elementary bricks of a microinjector intended to a microsystem of gas chromatography. The analysis on site of the natural gas being the aim of this micro GC system, the microvalves have to be chemically inert so as to withstand corrosive components such as hydrogen sulfide. Moreover, we have chosen the pneumatic actuation of a mobile membrane, which imposes the membrane to be constituted of a flexible and airtight material. The Poly Ether Ether Ketone (PEEK) has be selected, as it answers the previously described constraints et we have thus used it, for the first time to our knowledge, as the elastic material of a structural element of a MEMS device, namely the membrane of our microvalves. Consecutive to the presentation of an assembly process of PEEK with silicon wafers as well as to the entire fabrication process of the rnicrovalves, the mechanical properties of the PEEK membrane have been drown out, and the characteristics of the microvalve as a functional microfluidic device are outlined. Finally, we pursue with the design, fabrication and first evaluation tests of microsystern of gas sample injection (or microinjector), comprising six PEEK-based microvalves
1 edition published in 2010 in French and held by 1 WorldCat member library worldwide
This thesis deals with the conception, the fabrication and the study of microvalves, as elementary bricks of a microinjector intended to a microsystem of gas chromatography. The analysis on site of the natural gas being the aim of this micro GC system, the microvalves have to be chemically inert so as to withstand corrosive components such as hydrogen sulfide. Moreover, we have chosen the pneumatic actuation of a mobile membrane, which imposes the membrane to be constituted of a flexible and airtight material. The Poly Ether Ether Ketone (PEEK) has be selected, as it answers the previously described constraints et we have thus used it, for the first time to our knowledge, as the elastic material of a structural element of a MEMS device, namely the membrane of our microvalves. Consecutive to the presentation of an assembly process of PEEK with silicon wafers as well as to the entire fabrication process of the rnicrovalves, the mechanical properties of the PEEK membrane have been drown out, and the characteristics of the microvalve as a functional microfluidic device are outlined. Finally, we pursue with the design, fabrication and first evaluation tests of microsystern of gas sample injection (or microinjector), comprising six PEEK-based microvalves
Conception et optimisation de transducteurs capacitifs micro-usinés appliqués à l'imagerie ultrasonore by
Maxime Hery(
)
1 edition published in 2019 in French and held by 1 WorldCat member library worldwide
Les Transducteurs Ultrasonores Capacitifs Micro-usinés (CMUT en anglais) sont étudiés par plusieurs laboratoires internationaux depuis les années 90. Se présentant comme une alternative aux transducteurs traditionnels piézoélectriques, cette technologie inspirée des MEMS (MicroElectroMechanical Systems) a aujourd'hui atteint la maturité suffisante pour voir émerger sa commercialisation. Dans son application historique, l'imagerie médicale, de nombreux acteurs industriels proposent des sondes CMUTs, comme Hitachi, Kolo Medicals ou Butterfly Network pour n'en citer que quelques uns. La recherche autour de ces dispositifs continue néanmoins à travers des études sur la conception, la modélisation, la fabrication ou pour de nouvelles applications. À travers le projet collaboratif TUMAHI (Transducteurs capacitifs Ultrasonores Multi-Application Hautement Intégrés) entre le laboratoire GREMAN et la société VERMON S.A, deux axes d'optimisation ont été étudiés. Le premier objectif consistait à créer et valider expérimentalement une stratégie de conception d'éléments CMUTs pour optimiser la réponse électroacoustique sur la bande passante ou la sensibilité. La principale contrainte était de définir des degrés de liberté et des paramètres fixes pour fabriquer des barrettes CMUTs pour diverses applications et fréquences de travail sur un même wafer. Par l'intermédiaire d'un dispositif centré à 10 MHz pour de l'imagerie médicale, nous avons fait varier les tailles de membranes pour posséder une configuration Large Bande et une configuration Sensible. Une campagne de mesures de pression a été effectuée avec les sondes complètes et prêtes à l'emploi pour valider les critères de conception établis. L'analyse poussée a néanmoins souligné que la démarche de conception pour une sonde CMUT la plus efficace était d'optimiser la fréquence de résonance du premier mode de rayonnement pour qu'elle coïncide avec la fréquence de travail désirée. La seconde étude était focalisée sur la couche de passivation, couche de protection pour les éléments CMUTs traditionnellement conçue en polymère silicone, et visait à implémenter son impact dans les outils de modélisation avec un nouveau modèle de couplage CMUT / matériau viscoélastique. Une fonction de Green en trois dimensions a été utilisée en définissant des équivalences entre propriétés élastiques et viscoélastiques et validée théoriquement avec des problèmes de Lamb 2D et 3D complémentaires. Une confrontation avec des résultats expérimentaux a été engagée en créant une série d'huiles avec des viscosités variables et en excitant des colonnes CMUTs découplées électriquement pour viser un mode de rayonnement plus sensible aux propriétés de cisaillement du milieu. L'influence de la viscosité a été identifiée à travers la variation de la fréquence centrale et du facteur de qualité sur l'impédance électrique mesurée et simulée, posant la base d'une étude de viabilité de la technologie CMUT pour un capteur sensible viscoélastique. La considération de la couche de passivation a permis de retrouver un comportement équivalent à la réalité mais nécessite une base de données complète sur les propriétés viscoélastiques des matériaux dans le domaine ultrasonore pour être présente dans les étapes de conception d'un transducteur CMUT
1 edition published in 2019 in French and held by 1 WorldCat member library worldwide
Les Transducteurs Ultrasonores Capacitifs Micro-usinés (CMUT en anglais) sont étudiés par plusieurs laboratoires internationaux depuis les années 90. Se présentant comme une alternative aux transducteurs traditionnels piézoélectriques, cette technologie inspirée des MEMS (MicroElectroMechanical Systems) a aujourd'hui atteint la maturité suffisante pour voir émerger sa commercialisation. Dans son application historique, l'imagerie médicale, de nombreux acteurs industriels proposent des sondes CMUTs, comme Hitachi, Kolo Medicals ou Butterfly Network pour n'en citer que quelques uns. La recherche autour de ces dispositifs continue néanmoins à travers des études sur la conception, la modélisation, la fabrication ou pour de nouvelles applications. À travers le projet collaboratif TUMAHI (Transducteurs capacitifs Ultrasonores Multi-Application Hautement Intégrés) entre le laboratoire GREMAN et la société VERMON S.A, deux axes d'optimisation ont été étudiés. Le premier objectif consistait à créer et valider expérimentalement une stratégie de conception d'éléments CMUTs pour optimiser la réponse électroacoustique sur la bande passante ou la sensibilité. La principale contrainte était de définir des degrés de liberté et des paramètres fixes pour fabriquer des barrettes CMUTs pour diverses applications et fréquences de travail sur un même wafer. Par l'intermédiaire d'un dispositif centré à 10 MHz pour de l'imagerie médicale, nous avons fait varier les tailles de membranes pour posséder une configuration Large Bande et une configuration Sensible. Une campagne de mesures de pression a été effectuée avec les sondes complètes et prêtes à l'emploi pour valider les critères de conception établis. L'analyse poussée a néanmoins souligné que la démarche de conception pour une sonde CMUT la plus efficace était d'optimiser la fréquence de résonance du premier mode de rayonnement pour qu'elle coïncide avec la fréquence de travail désirée. La seconde étude était focalisée sur la couche de passivation, couche de protection pour les éléments CMUTs traditionnellement conçue en polymère silicone, et visait à implémenter son impact dans les outils de modélisation avec un nouveau modèle de couplage CMUT / matériau viscoélastique. Une fonction de Green en trois dimensions a été utilisée en définissant des équivalences entre propriétés élastiques et viscoélastiques et validée théoriquement avec des problèmes de Lamb 2D et 3D complémentaires. Une confrontation avec des résultats expérimentaux a été engagée en créant une série d'huiles avec des viscosités variables et en excitant des colonnes CMUTs découplées électriquement pour viser un mode de rayonnement plus sensible aux propriétés de cisaillement du milieu. L'influence de la viscosité a été identifiée à travers la variation de la fréquence centrale et du facteur de qualité sur l'impédance électrique mesurée et simulée, posant la base d'une étude de viabilité de la technologie CMUT pour un capteur sensible viscoélastique. La considération de la couche de passivation a permis de retrouver un comportement équivalent à la réalité mais nécessite une base de données complète sur les propriétés viscoélastiques des matériaux dans le domaine ultrasonore pour être présente dans les étapes de conception d'un transducteur CMUT
Modélisation et caractérisation de transducteurs ultrasonores capacitifs micro-usinés appliqués à la réalisation de
transformateurs pour l'isolation galvanique by
Jacques Heller(
)
1 edition published in 2018 in French and held by 1 WorldCat member library worldwide
This work is a study of CMUT (Capacitive Micromachined Ultrasonic Transduer)based acoustical transformers as a step in the development of insulating components in semiconductor switches control chain. CMUT transducers being electromechanical systems (MEMS), their monolithic integration with semiconductor switches is full of interesting perspectives . The proposed architecture consists of two CMUTs layered on each side of a silicon substrate. A computational tool was designed to predict the behaviour of the transformer. Measurement protocols of the power efficiency of the constructed transformers were set up and allowed to quantify the prototypes' performances (A 32 % efficiency is currently reached, with improvements attainable up to 60 %). Exploring the results of the developed model, validated by bench measurements, allowed to determine the current limits of the transformers as well as perspectives of improvement
1 edition published in 2018 in French and held by 1 WorldCat member library worldwide
This work is a study of CMUT (Capacitive Micromachined Ultrasonic Transduer)based acoustical transformers as a step in the development of insulating components in semiconductor switches control chain. CMUT transducers being electromechanical systems (MEMS), their monolithic integration with semiconductor switches is full of interesting perspectives . The proposed architecture consists of two CMUTs layered on each side of a silicon substrate. A computational tool was designed to predict the behaviour of the transformer. Measurement protocols of the power efficiency of the constructed transformers were set up and allowed to quantify the prototypes' performances (A 32 % efficiency is currently reached, with improvements attainable up to 60 %). Exploring the results of the developed model, validated by bench measurements, allowed to determine the current limits of the transformers as well as perspectives of improvement
Microcapteurs chimiques à base de micropoutres en silicium modi?ées à l'aide de matériaux inorganiques microporeux by
Sébastien Tétin(
)
1 edition published in 2009 in French and held by 1 WorldCat member library worldwide
In order to optimize the use of microcantilever in the way of chemical sensing, microporous sensitive coatings have been tried to detect ethanol, toluene and humidity. The use of microcantilever without sensitive coating have been performed and simple models has been made and permit to predict the response of microcantilever in different environments. These studies rely on the use of microcantilever within two different detection mode: the detection of mass variation of the sensor because of the sorption of species in sensitive coating; and the detection of the change of physical properties of the fluid
1 edition published in 2009 in French and held by 1 WorldCat member library worldwide
In order to optimize the use of microcantilever in the way of chemical sensing, microporous sensitive coatings have been tried to detect ethanol, toluene and humidity. The use of microcantilever without sensitive coating have been performed and simple models has been made and permit to predict the response of microcantilever in different environments. These studies rely on the use of microcantilever within two different detection mode: the detection of mass variation of the sensor because of the sorption of species in sensitive coating; and the detection of the change of physical properties of the fluid
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Related Identities
- École doctorale des sciences physiques et de l'ingénieur (Talence, Gironde) Other
- Université Bordeaux-I (1971-2013) Other Degree grantor
- Laboratoire de l'intégration du matériau au système (Talence, Gironde) Other
- Université de Bordeaux (2014-....). Degree grantor
- Nicu, Liviu (19..-....). Other Opponent Thesis advisor
- Université Paris-Sud (1970-2019) Degree grantor
- Communauté d'universités et d'établissements Université Grenoble Alpes Degree grantor
- Lefeuvre, Elie (19..-....; chercheur en génie électrique) Other
- Placko, Dominique Thesis advisor
- Dufour-Gergam, Elisabeth (19..-....). Other Opponent Thesis advisor