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Advances in Patterning Materials and Processes XXXIV

Author: Christoph K Hohle; SPIE (Society)
Publisher: Bellingham, Washington : SPIE, [2017] copyright 2017
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 10146.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Summary:

Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

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Genre/Form: Electronic book
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Christoph K Hohle; SPIE (Society)
OCLC Number: 1004385613
Description: 1 online resource : illustrations
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 10146.
Responsibility: Christoph Hohle.

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