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Analytic analysis of ellipsometric errors

Author: Deane Chandler-Horowitz
Publisher: Gaithersburg, MD : U.S. Dept. of Commerce, National Bureau of Standards ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O., [1986]
Series: Semiconductor measurement technology.; NBS special publication, 400-78.
Edition/Format:   Print book : National government publication : EnglishView all editions and formats
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Material Type: Government publication, National government publication
Document Type: Book
All Authors / Contributors: Deane Chandler-Horowitz
OCLC Number: 14557420
Notes: "Issued May 1986."
Description: iii, 32 pages : illustrations ; 28 cm.
Series Title: Semiconductor measurement technology.; NBS special publication, 400-78.
Responsibility: Deane Chandler-Horowitz.

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Primary Entity

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