skip to content
ASMC 2008 : [IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 5-7 May, 2008, Cambridge, Massachusetts Preview this item
ClosePreview this item
Checking...

ASMC 2008 : [IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 5-7 May, 2008, Cambridge, Massachusetts

Author: Semiconductor Equipment and Materials International.
Publisher: [Piscataway, N.J.] : IEEE Xplore, [2008]
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Electronic books
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Semiconductor Equipment and Materials International.
OCLC Number: 501200706
Notes: Title from PDF table of contents page (IEEE Xplore, viewed Jan. 21, 2010).
Description: 1 online resource (various pagings) : illustrations
Other Titles: IEEE/SEMI Advanced Semiconductor Manufacturing Conference
Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
Responsibility: sponsored by SEMI and IEEE].

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/501200706> # ASMC 2008 : [IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 5-7 May, 2008, Cambridge, Massachusetts
    a schema:Book, schema:MediaObject, schema:CreativeWork ;
    library:oclcnum "501200706" ;
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nju> ;
    library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/510698082#Place/piscataway_n_j> ; # Piscataway, N.J.
    schema:about <http://experiment.worldcat.org/entity/work/data/510698082#Topic/semiconductor_industry_management> ; # Semiconductor industry--Management
    schema:about <http://experiment.worldcat.org/entity/work/data/510698082#Topic/semiconductor_industry_production_control> ; # Semiconductor industry--Production control
    schema:about <http://id.worldcat.org/fast/1112154> ; # Semiconductor industry--Management
    schema:about <http://experiment.worldcat.org/entity/work/data/510698082#Topic/process_control> ; # Process control
    schema:about <http://id.worldcat.org/fast/1112157> ; # Semiconductor industry--Production control
    schema:about <http://experiment.worldcat.org/entity/work/data/510698082#Topic/semiconductors_design_and_construction> ; # Semiconductors--Design and construction
    schema:about <http://id.worldcat.org/fast/1078020> ; # Process control
    schema:about <http://id.worldcat.org/fast/1112213> ; # Semiconductors--Design and construction
    schema:alternateName "IEEE/SEMI Advanced Semiconductor Manufacturing Conference" ;
    schema:alternateName "Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI" ;
    schema:bookFormat schema:EBook ;
    schema:contributor <http://viaf.org/viaf/137722322> ; # Semiconductor Equipment and Materials International.
    schema:creator <http://experiment.worldcat.org/entity/work/data/510698082#Meeting/ieee_semi_advanced_semiconductor_manufacturing_conference_and_workshop_19th_2008_cambridge_mass> ; # IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (19th : 2008 : Cambridge, Mass.)
    schema:datePublished "2008" ;
    schema:exampleOfWork <http://worldcat.org/entity/work/id/510698082> ;
    schema:genre "Conference publication"@en ;
    schema:genre "Conference papers and proceedings"@en ;
    schema:genre "Electronic books"@en ;
    schema:inLanguage "en" ;
    schema:name "ASMC 2008 : [IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 5-7 May, 2008, Cambridge, Massachusetts"@en ;
    schema:productID "501200706" ;
    schema:publication <http://www.worldcat.org/title/-/oclc/501200706#PublicationEvent/piscataway_n_j_ieee_xplore_2008> ;
    schema:publisher <http://experiment.worldcat.org/entity/work/data/510698082#Agent/ieee_xplore> ; # IEEE Xplore
    schema:url <http://liverpool.idm.oclc.org/login?url=https://ieeexplore.ieee.org/servlet/opac?punumber=4519622> ;
    schema:url <http://ieeexplore.ieee.org/servlet/opac?punumber=4519622> ;
    schema:url <https://proxy.library.carleton.ca/login?url=https://ieeexplore.ieee.org/servlet/opac?punumber=4519622> ;
    schema:url <http://ezproxy.uis.edu:2048/login?url=http://ieeexplore.ieee.org/servlet/opac?punumber=4519622> ;
    schema:url <http://www.ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=4519622> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/501200706> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/510698082#Meeting/ieee_semi_advanced_semiconductor_manufacturing_conference_and_workshop_19th_2008_cambridge_mass> # IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (19th : 2008 : Cambridge, Mass.)
    a bgn:Meeting, schema:Event ;
    schema:location <http://experiment.worldcat.org/entity/work/data/510698082#Place/cambridge_mass> ; # Cambridge, Mass.)
    schema:name "IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (19th : 2008 : Cambridge, Mass.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/510698082#Place/cambridge_mass> # Cambridge, Mass.)
    a schema:Place ;
    schema:name "Cambridge, Mass.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/510698082#Place/piscataway_n_j> # Piscataway, N.J.
    a schema:Place ;
    schema:name "Piscataway, N.J." ;
    .

<http://experiment.worldcat.org/entity/work/data/510698082#Topic/semiconductor_industry_production_control> # Semiconductor industry--Production control
    a schema:Intangible ;
    schema:hasPart <http://id.loc.gov/authorities/subjects/sh85119894> ;
    schema:name "Semiconductor industry--Production control"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/510698082#Topic/semiconductors_design_and_construction> # Semiconductors--Design and construction
    a schema:Intangible ;
    rdfs:seeAlso <http://id.loc.gov/authorities/subjects/sh2008111516> ;
    schema:name "Semiconductors--Design and construction"@en ;
    .

<http://id.worldcat.org/fast/1078020> # Process control
    a schema:Intangible ;
    schema:name "Process control"@en ;
    .

<http://id.worldcat.org/fast/1112154> # Semiconductor industry--Management
    a schema:Intangible ;
    schema:name "Semiconductor industry--Management"@en ;
    .

<http://id.worldcat.org/fast/1112157> # Semiconductor industry--Production control
    a schema:Intangible ;
    schema:name "Semiconductor industry--Production control"@en ;
    .

<http://id.worldcat.org/fast/1112213> # Semiconductors--Design and construction
    a schema:Intangible ;
    schema:name "Semiconductors--Design and construction"@en ;
    .

<http://viaf.org/viaf/137722322> # Semiconductor Equipment and Materials International.
    a schema:Organization ;
    schema:name "Semiconductor Equipment and Materials International." ;
    .

<http://www.worldcat.org/title/-/oclc/501200706>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
    schema:about <http://www.worldcat.org/oclc/501200706> ; # ASMC 2008 : [IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 5-7 May, 2008, Cambridge, Massachusetts
    schema:dateModified "2018-12-01" ;
    void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .

<https://proxy.library.carleton.ca/login?url=https://ieeexplore.ieee.org/servlet/opac?punumber=4519622>
    rdfs:comment "IEEE Xplore (Access restricted to 50 simultaneous users)" ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.