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Caractérisation hyperfréquence sous pointes de nano-dispositifs : métrologie et instrumentation

Author: Khadim DafféGilles DambrineKamel HaddadiUniversité Lille 1 - Sciences et technologies (Villeneuve-d'Ascq / 1970-2017).École doctorale Sciences pour l'Ingénieur (Lille).All authors
Publisher: 2018.
Dissertation: Thèse de doctorat : Électronique,Microélectronique, Nanoélectronique etMicro-ondes : Lille 1 : 2018.
Edition/Format:   Computer file : Document : Thesis/dissertation : French
Summary:
Dans un contexte de développement spectaculaire des nano-objets, il est nécessaire de développer des moyens de caractérisation électrique haute fréquence sous pointes adaptés aux petites échelles. En particulier, deux verrous instrumentaux doivent être levés. D'une part, la principale difficulté pour caractériser des nano-composants est qu'ils présentent en régime dynamique de fortes valeurs
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Genre/Form: Thèses et écrits académiques
Material Type: Document, Thesis/dissertation, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Khadim Daffé; Gilles Dambrine; Kamel Haddadi; Université Lille 1 - Sciences et technologies (Villeneuve-d'Ascq / 1970-2017).; École doctorale Sciences pour l'Ingénieur (Lille).; Institut d'électronique, de microélectronique et de nanotechnologie (1992-....).
OCLC Number: 1101611074
Notes: Titre provenant de l'écran-titre.
Description: 1 online resource
Responsibility: Khadim Daffé ; sous la direction de Gilles Dambrine et de Kamel Haddadi.

Abstract:

Dans un contexte de développement spectaculaire des nano-objets, il est nécessaire de développer des moyens de caractérisation électrique haute fréquence sous pointes adaptés aux petites échelles. En particulier, deux verrous instrumentaux doivent être levés. D'une part, la principale difficulté pour caractériser des nano-composants est qu'ils présentent en régime dynamique de fortes valeurs d'impédances comparativement à celles des systèmes de mesure hyperfréquence usuels. D'autre part, Il existe une discontinuité de taille entre les nano-objets et les systèmes de mesure conventionnels. Compte tenu du challenge scientifique et d'un état de l'art relativement limité, plusieurs voies ont été explorées de concert. En premier lieu, dans le cadre d'un projet européen regroupant les acteurs de la métrologie, et du laboratoire commun IEMN-STMicroelectronics®, la traçabilité des mesures hautes impédances de nano-dispositifs est établie. Par ailleurs, il s'agit de développement de nouvelles générations de sondes GSG (Ground-Signal-Ground) en technologie MEMS (Microelectromechanical systems), miniaturisées et adaptées à la taille des nano-dispositifs. Les sondes sont montées sur une plateforme de nano-positionnement robotisée et intégrée dans un microscope électronique à balayage.

In the frame of the spectacular development of nano-objects, innovative on-wafer electrical measurement methods must be addressed at the nanoscale. In particular, two main issues have been identified. On one hand, nano-devices exhibit very high dynamic impedance in contrast with conventional measuring microwave instruments. On the other hand, there is an inherent size discontinuity between nano-objects and conventional measurement systems. Given the scientific challenge and a relatively limited state of the art, several avenues of investigation have been explored. First, as part of a European project bringing together metrology laboratories, and the joint laboratory IEMN-STMicroelectronics®, the traceability of nano-devices high impedance measurements is established. In a second step, the development of an electrical on-wafer measuring platform for nano-devices is described. This includes the development of new generations of GSG (Ground-Signal-Ground) miniaturized probes in MEMS (Microelectromechanical systems) technology with reduced access pads. The probes are mounted on a robotic nano-positioning platform integrated in a scanning electron microscope.

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<http:\/\/www.worldcat.org\/oclc\/1101611074<\/a>> # Caract\u00E9risation hyperfr\u00E9quence sous pointes de nano-dispositifs : m\u00E9trologie et instrumentation<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:Thesis<\/a>, bgn:ComputerFile<\/a>, schema:MediaObject<\/a>, schema:CreativeWork<\/a> ;\u00A0\u00A0\u00A0\nbgn:inSupportOf<\/a> \"Th\u00E8se de doctorat : \u00C9lectronique,Micro\u00E9lectronique, Nano\u00E9lectronique etMicro-ondes : Lille 1 : 2018.<\/span>\" ;\u00A0\u00A0\u00A0\nlibrary:oclcnum<\/a> \"1101611074<\/span>\" ;\u00A0\u00A0\u00A0\nlibrary:placeOfPublication<\/a> <http:\/\/id.loc.gov\/vocabulary\/countries\/fr<\/a>> ;\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Thing\/nano_positionnement<\/a>> ; # Nano-Positionnement<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Thing\/mesures_sous_pointes<\/a>> ; # Mesures sous pointes<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Thing\/varicap_sub_ff<\/a>> ; # Varicap sub-FF<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Thing\/analyseur_de_reseau_vectoriel<\/a>> ; # Analyseur de r\u00E9seau vectoriel<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Topic\/incertitude_de_mesure<\/a>> ; # Incertitude de mesure<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Topic\/mesure_instruments<\/a>> ; # Mesure--Instruments<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/dewey.info\/class\/681.2\/<\/a>> ;\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Topic\/microscopie_electronique_a_balayage<\/a>> ; # Microscopie \u00E9lectronique \u00E0 balayage<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Topic\/nanotechnologie<\/a>> ; # Nanotechnologie<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Topic\/analyse_par_microsonde<\/a>> ; # Analyse par microsonde<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Topic\/ondes_millimetriques_mesure<\/a>> ; # Ondes millim\u00E9triques--Mesure<\/span>\n\u00A0\u00A0\u00A0\nschema:author<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Person\/daffe_khadim_1986<\/a>> ; # Khadim Daff\u00E9<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Person\/haddadi_kamel_1977<\/a>> ; # Kamel Haddadi<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Person\/dambrine_gilles<\/a>> ; # Gilles Dambrine<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Organization\/universite_lille_1_sciences_et_technologies_villeneuve_d_ascq_1970_2017<\/a>> ; # Universit\u00E9 Lille 1 - Sciences et technologies (Villeneuve-d\'Ascq \/ 1970-2017).<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Organization\/ecole_doctorale_sciences_pour_l_ingenieur_lille<\/a>> ; # \u00C9cole doctorale Sciences pour l\'Ing\u00E9nieur (Lille).<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/9115173709#Organization\/institut_d_electronique_de_microelectronique_et_de_nanotechnologie_1992<\/a>> ; # Institut d\'\u00E9lectronique, de micro\u00E9lectronique et de nanotechnologie (1992-....).<\/span>\n\u00A0\u00A0\u00A0\nschema:datePublished<\/a> \"2018<\/span>\" ;\u00A0\u00A0\u00A0\nschema:description<\/a> \"Dans un contexte de d\u00E9veloppement spectaculaire des nano-objets, il est n\u00E9cessaire de d\u00E9velopper des moyens de caract\u00E9risation \u00E9lectrique haute fr\u00E9quence sous pointes adapt\u00E9s aux petites \u00E9chelles. 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