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Genre/Form: | Thèses et écrits académiques |
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Material Type: | Document, Thesis/dissertation, Internet resource |
Document Type: | Internet Resource, Computer File |
All Authors / Contributors: |
Khadim Daffé; Gilles Dambrine; Kamel Haddadi; Université Lille 1 - Sciences et technologies (Villeneuve-d'Ascq / 1970-2017).; École doctorale Sciences pour l'Ingénieur (Lille).; Institut d'électronique, de microélectronique et de nanotechnologie (1992-....). |
OCLC Number: | 1101611074 |
Notes: | Titre provenant de l'écran-titre. |
Description: | 1 online resource |
Responsibility: | Khadim Daffé ; sous la direction de Gilles Dambrine et de Kamel Haddadi. |
Abstract:
In the frame of the spectacular development of nano-objects, innovative on-wafer electrical measurement methods must be addressed at the nanoscale. In particular, two main issues have been identified. On one hand, nano-devices exhibit very high dynamic impedance in contrast with conventional measuring microwave instruments. On the other hand, there is an inherent size discontinuity between nano-objects and conventional measurement systems. Given the scientific challenge and a relatively limited state of the art, several avenues of investigation have been explored. First, as part of a European project bringing together metrology laboratories, and the joint laboratory IEMN-STMicroelectronics®, the traceability of nano-devices high impedance measurements is established. In a second step, the development of an electrical on-wafer measuring platform for nano-devices is described. This includes the development of new generations of GSG (Ground-Signal-Ground) miniaturized probes in MEMS (Microelectromechanical systems) technology with reduced access pads. The probes are mounted on a robotic nano-positioning platform integrated in a scanning electron microscope.
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