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Contamination-free manufacturing for semiconductors and other precision products

Author: R P Donovan
Publisher: Boca Raton, FL : CRC Press, an imprint of Taylor and Francis, 2001.
Edition/Format:   eBook : Document : English : First editionView all editions and formats
Summary:
Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with  Read more...
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Genre/Form: Electronic books
Additional Physical Format: Print version:
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: R P Donovan
ISBN: 9781482289992 1482289997 9780824703806 0824703804 9781315214481 1315214482 9781351830379 1351830376 9781351821681 1351821687
OCLC Number: 1074362117
Description: 1 online resource (460 pages)
Contents: Chapter 1 Introduction / Robert P. Donovan --
chapter 2 National Technology Roadmap for Semiconductors: Basis and Alignment --
chapter 3 Off-Wafer Measurement of Contaminants / Robert P. Donovan --
chapter 4 On-Wafer Measurement of Particles / Rodolfo E. Diaz --
chapter 5 On-Wafer Measurement of Molecular Contaminants / Victor K.F. Chia --
chapter 6 Transport and Deposition of Aerosol Particles / Anthony S. Geller --
chapter 7 Particulate Deposition in Liquid Systems / Deborah J. Riley --
chapter 8 Deposition of Molecular Contaminants in Gaseous Environments --
chapter 9 Organic Contamination Removal / Steven Verhaverbeke --
chapter 10 Deposition of Metallic Contaminants from Liquids and Their Removal --
chapter 11 Sources of Contamination and Their Control / David Jensen.
Responsibility: by Robert P. Donovan.

Abstract:

Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this reference provides advanced treatment on the origins, procedures,  Read more...

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