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Defect Recognition and Image Processing in Semiconductors 1997 : Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997.

Author: J Doneker
Publisher: Boca Raton, FL : CRC Press, 2017.
Series: Institute of Physics conference series, no. 160.
Edition/Format:   eBook : Document : Conference publication : English : First editionView all editions and formats
Summary:
"Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits  Read more...
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Genre/Form: Electronic books
Conference papers and proceedings
Congresses
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: J Doneker
ISBN: 9781315140810 1315140810 9781351456470 1351456474
OCLC Number: 1014359236
Description: 1 online resource : text file, PDF
Contents: Chapter 1 Nanoscanning --
chapter 2 Electron beam methods --
chapter 3 Optical methods --
chapter 4 Mapping --
chapter 5 X-ray methods --
chapter 6 Other and combined methods --
chapter 7 Image processing --
chapter 8 Standardization --
chapter 9 Si and SiGe mixed crystals --
chapter 10 SiC --
chapter 11 GaN --
chapter 12 Other III-V compounds --
chapter 13 II-VI compounds, phosphors, oxides and alternative substrates --
chapter 14 Processing and defects --
chapter 15 Defect recognition in devices and degradation.
Series Title: Institute of Physics conference series, no. 160.

Abstract:

Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect  Read more...

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listed in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database. in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Read more...

 
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