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Fabrication of Three-Dimensional Concave or Convex Shell Structures with Shell Elements at Micrometer Resolution in SU-8

Author: Louis W Y Liu; Qingfeng Zhang; Yifan Chen
Edition/Format: Chapter Chapter : English
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All Authors / Contributors: Louis W Y Liu; Qingfeng Zhang; Yifan Chen
ISBN: 978-953-51-2457-3 978-953-51-2458-0
Publication:Stoytcheva, Margarita; Lab-on-a-Chip Fabrication and Application; InTech
Language Note: English
Unique Identifier: 7390781634
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